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System and method for programmable illumination pattern generation

  • US 7,144,119 B2
  • Filed: 01/24/2001
  • Issued: 12/05/2006
  • Est. Priority Date: 04/25/1996
  • Status: Expired due to Term
First Claim
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1. A process for using a programmable illumination pattern generator so as to provide active feedback in the optimization of an illumination pattern prepared by said pattern generator, said process comprising:

  • creating a predetermined illumination pattern;

    configuring said programmable illumination pattern generator in accordance with said predetermined illumination pattern;

    illuminating a field of view on a substrate using a light source and a projection system using the programmable illumination pattern generator;

    acquiring an image of the field of view;

    analyzing said image so as to extract a set of feature coordinates within the image; and

    iterating said creating, configuring, illuminating, acquiring and analyzing steps n times, wherein n is an integer from zero to 10,000, using said feature coordinates determined in the (n−

    1)th analyzing step so as to create a derivative optimized illumination pattern.

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