Multilayer microcavity devices and methods
First Claim
1. An electrochemical sensing device wherein analyte-selective organic materials are suspended over a cavity, said cavity penetrating alternating submicroelectrode layers and insulating layers, said submicroelectrode layers having embedded electrodes in said cavity'"'"'s walls, top opening and entire bottom of said cavity, and wherein said analyte selective organic materials being suspended such that they do not come in contact with the submicroelectrodes in the walls or bottom of the cavity.
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Accused Products
Abstract
Microcavities and micropores that are microscopic (<1 mm) in width and depth and contain any number of individually-addressable electrodes, separated by insulators, along the walls of each cavity. The conducting materials, and the insulator materials can be deposited alternately onto a starting substrate, which is typically an oxidized silicon wafer or polyimide film, but may be any substrate that shows good adhesion to the materials layered on it. The cavities are etched through these layers, perpendicular to the plane of the substrate, exposing the layers at their edges. Pores may be carved entirely through the device.
86 Citations
35 Claims
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1. An electrochemical sensing device wherein analyte-selective organic materials are suspended over a cavity, said cavity penetrating alternating submicroelectrode layers and insulating layers, said submicroelectrode layers having embedded electrodes in said cavity'"'"'s walls, top opening and entire bottom of said cavity, and wherein said analyte selective organic materials being suspended such that they do not come in contact with the submicroelectrodes in the walls or bottom of the cavity.
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2. A microcavity device comprising:
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(a) a flexible polymer substrate; (b) at least three integrated, independently addressable electrodes, wherein one of the electrodes is a disk electrode attached to an adhesion layer which is deposited on the substrate and covering the entire substrate and bottom of the microcavity and not used as a reference electrode, wherein at least one of the electrodes is nanoband or ring electrode embedded along walls of said microcavity, and wherein one of the electrodes is a ring electrode along the top opening of said microcavity; (c) conducting layers connected to said electrodes, said conducting layers being planar and parallel to one another and comprising contact pads; (d) an insulating layer separating adjacent conducting layers; (e) said conducting layers and insulating layer being on top of said substrate; (f) at least one microcavity penetrating said conducting layers and said insulating layer, said microcavity having a depth, a diameter and a top opening; (g) adhesion layers between the insulating and conducting layers and the conducting layer and the substrate; (h) said substrate comprising kapton, polydimethylsiloxane (PDMS), benzoclyclobutene (BCB), polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), parylene, or polyimide; and (i) said insulating layers comprising polyimide kapton, or polydimethylsiloxane (PDMS). - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A microcavity device comprising:
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(a) a rigid substrate; (b) at least three integrated, independently addressable electrodes, wherein one of the electrodes is a disk electrode attached to an adhesion layer which is deposited on the substrate and covering the entire bottom of the microcavity and not used as a reference electrode, wherein at least one of the electrodes is nanoband or ring electrode embedded along walls of said microcavity, and wherein one of the electrodes is a ring electrode along the top opening of said microcavity; (c) conducting layers connected to said electrodes, said conducting layers being planar and parallel to one another and comprising contact pads; (d) an insulating layer separating adjacent conducting layers; (e) said conducting layers and insulating layer being on top of said substrate; (f) at least one microcavity penetrating said conducting layers and said insulating layer, said microcavity having a depth, a diameter and a top opening; (g) adhesion layers between the insulating and conducting layers and the conducting layer and the substrate; (h) said substrate comprising silicon wafer, glass, mica or ceramics; and (i) said insulating layers comprising polyimide, kapton or polydimethylsiloxane (PDMS). - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A microcavity device for detecting amino acids, comprising:
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(a) a silicon wafer to act as a substrate for the microcavity device; (b) conductor layers; (c) electrodes connected to said conductor layers, wherein one of the electrodes is a microdisk electrode on the substrate and covering the bottom of the microcavity and not used as a reference electrode; (d) a polyimide insulating layer to separate said conductor layers; and (e) a microcavity penetrating at least one electrode and at least one insulating layer, wherein said conductor layers and said electrodes are made of at least one of gold and copper. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification