Thin-film battery having ultra-thin electrolyte
First Claim
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1. A thin-film battery, comprising:
- a substrate;
an electrode first film on the substrate;
an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein the electrolyte second film includes an electrolyte formed from electrolyte material deposited in the presence of energized particles to form a desired film structure; and
an electrode third film on the second film;
wherein the electrolyte second film is a thickness in a range from about 1 nanometer to about 100 nanometers.
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
240 Citations
28 Claims
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1. A thin-film battery, comprising:
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a substrate; an electrode first film on the substrate; an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein the electrolyte second film includes an electrolyte formed from electrolyte material deposited in the presence of energized particles to form a desired film structure; and an electrode third film on the second film; wherein the electrolyte second film is a thickness in a range from about 1 nanometer to about 100 nanometers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A thin-film battery comprising:
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a substrate; an electrode first film on the substrate; an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, wherein the electrolyte second film includes LiPON electrolyte material deposited using a deposition source and energized nitrogen particles from a second source such that the energized nitrogen particles provide energy to the electrolyte material during its deposition to form the electrolyte material into a desired film structure, and wherein the electrolyte second film is a thickness of less than about 1000 Angstroms; and an electrode third film; wherein the battery includes the electrode third film, the electrolyte second film, and the electrode first film. - View Dependent Claims (22, 23, 24, 25, 26, 27)
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28. A thin-film battery, comprising:
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a substrate; an electrode first film on the substrate; an electrolyte second film on the first film, wherein the electrolyte second film blocks the flow of electrons while permitting the flow of ions, and wherein the electrolyte second film includes an electrolyte formed from electrolyte material deposited in the presence of energized particles to form a desired film structure, wherein the electrolyte second film is a thickness in a range from about 1 nanometer to about 100 nanometers; and an electrode third film, wherein the battery includes the electrode third film, the electrolyte second film, and the electrode first film.
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Specification