Tunable sensor

• US 7,145,143 B2
• Filed: 12/31/2003
• Issued: 12/05/2006
• Est. Priority Date: 03/18/2002
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Cole, Barrett E., Wood, Roland A., Higashi, Robert E., Youngner, Daniel W.
• Primary Examiner(s): Gabor, Otilia
• Application Number:
  US10/749,710
• Publication Number:
  US 20040217264A1
• Time in Patent Office: 1,070 Days
• Field of Search: 250/339.04, 250/339.02, 250/339.03, 250/339.01, 250/341.8, 356/352
• US Class Current: 250/339.04
• CPC Class Codes: G01B 11/272 using photoelectric detection means
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/36 Investigating two or more bands of a spectrum by separate detectors
• CPC Class Codes: G01J 3/427 Dual wavelengths spectrometry
• CPC Class Codes: G01J 5/023 Particular leg structure or construction or shape; Nanotubes
• CPC Class Codes: G01J 5/10 using electric radiation detectors
• CPC Class Codes: G01J 5/20 using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 5/284 of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/73204 the bump connector being embedded into the layer connector
• CPC Class Codes: H01L 27/14621 Colour filter arrangements
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 31/02024 Position sensitive and lateral effect photodetectors; Quadrant photodiodes
• CPC Class Codes: H01L 31/02162 for filtering or shielding light, e.g. multicolour filters for photodetectors
• CPC Class Codes: H01L 31/0232 Optical elements or arrangements associated with the device H01L31/0236 takes precedence; for photovoltaic cells H01L31/054; for photovoltaic modules H02S40/20
• CPC Class Codes: H01L 31/02325 the optical elements not being integrated nor being directly associated with the device

Abstract

A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.

Claims

1. An adaptive sensor comprising:

a plurality of detectors; and

wherein;

each detector comprises an adjustable filter; and

each adjustable filter is adjustable independent of an adjustment of another filter of a detector of the plurality of detectors.

2. The sensor of claim 1, wherein the plurality of detectors is situated in a sealed package.

3. The sensor of claim 2, wherein each detector further comprises an actuator connected to the adjustable filter.

4. The sensor of claim 3, wherein the actuator is an electrostatic actuator.

5. The sensor of claim 3, wherein each detector is an infrared light detector.

6. The sensor of claim 5, wherein the adjustable filter is a variable bandpass filter for infrared light.

7. The sensor of claim 5, wherein the adjustable filter is for selecting a bandpass mode for infrared light.

8. The sensor of claim 5, wherein each detector of the plurality of detectors is a bolometer.

9. The sensor of claim 2, wherein the adjustable filter is adjustable for selecting a wavelength from a plurality of wavelengths of light.

10. The sensor of claim 9, wherein each adjustable filter is a Fabry-Perot filter.

11. The sensor of claim 1, wherein the plurality of detectors is situated on a first wafer.

12. The sensor of claim 11, further comprising a second wafer, wherein the second wafer is a topcap situated on the first wafer thereby enclosing the plurality of detectors.

13. The sensor of claim 12, wherein the first and second wafers form an integrated vacuum package.

14. The sensor of claim 13, wherein the topcap comprises a light transmissive window.

15. A means for detecting comprising:

a means for detecting light; and

wherein;

the means for detecting light comprises a plurality of detectors;

each detector of the plurality of detectors comprises a variable wavelength filter; and

the variable wavelength filter is adjustable independent of a variable filter of another detector of the plurality of detectors.

16. The means of claim 15, wherein the each detector comprises an actuator connected to the variable filter.

17. The means of claim 16, wherein the actuator is a capacitive actuator.

18. The means of claim 15, wherein the variable filter is adjustable to a narrow bandpass at a wavelength of light.

19. The means of claim 18, wherein the wavelength of light is selectable from a range of wavelengths between about one micron and thirteen microns.

20. The means of claim 15, wherein the means for detecting light is situated in a sealed enclosure.

21. A method for detecting comprising:

providing a plurality of detectors;

wherein;

each detector of the plurality of detectors comprises an adjustable light filter; and

the filter is adjustable to a desired wavelength independently of at least another filter of a detector of the plurality of detectors.

22. The method of claim 21, further comprising situating the plurality of detectors in a sealed enclosure.

23. The method of claim 22, wherein the filter is electrostatically adjusted.

24. The method of claim 21, wherein the filter is attached to at least one leg spring for adjustment relative to an electrostatic force.

25. The method of claim 21, wherein the filter may be selectively adjusted to a wavelength of an infrared spectrum.

26. A sensor comprising:

an array of detectors; and

wherein;

each detector of the array of detectors comprises a tunable etalon; and

the etalon is tunable to desired band of light for a detector of the array of detectors independently of another tunable etalon of a detector of the array of detectors.

27. The sensor of claim 26, wherein the array of detectors is enclosed in a hermetically sealed package.

28. The sensor of claim 27, wherein the hermetically sealed package comprises:

a topcap; and

a base; and

wherein the topcap is bonded to the base.

29. The sensor of claim 28, wherein the topcap and base are bonded on a die-to-die basis.

30. The sensor of claim 26, wherein the etalon comprises an actuator to tune the etalon.

31. The sensor of claim 30, wherein the actuator operates according to an electrostatic force.

32. The sensor of claim 26, wherein the etalon is situated on a set of leg springs for movement for tuning.

33. The sensor of claim 26, wherein the etalon is tunable to a wavelength of a plurality of wavelengths of light.

34. The sensor of claim 33, wherein:

the detector is a bolometer; and

the etalon is a Fabry-Perot etalon.

35. An adaptive sensor comprising:

a plurality of detectors; and

wherein;

each detector comprises an adjustable filter and an actuator connected to the adjustable filter; and

each adjustable filter is adjustable independent of an adjustment of another filter of a detector of the plurality of detectors.