Scanning magnetic microscope having improved magnetic sensor
First Claim
1. A scanning magnetic microscope, comprising:
- a magnetic sensor for sensing a magnetic field generated by a specimen;
said magnetic sensor comprising at least two magnetic sensing units each defining a sensing axis, said sensing axes being disposed orthogonally to one another; and
translation means for translating at least one of said magnetic sensor and said specimen relative to one another along a measurement axis that is not parallel to the sensing axis;
further comprising means for maintaining said magnetic sensor in contact with a surface of said specimen during measurement.
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Accused Products
Abstract
A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing a magnetic field generated by a specimen (78), the sensor including one of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A–C, 52) for translating the sensor relative to a surface of sad specimen; and a data processor (50), having an input coupled to an output of said sensor, for constructing an image of said magnetic field. The sensor preferably includes one to three sensing units each defining a sensing axis for sensing a component of a magnetic field from a specimen, the sensing units disposed such that the sensing axes are orthogonal to one another. Pluralities of such sensors can be disposed in two or three dimensional arrays. The SMM can be used for examining the current flow in ICs, electromigration, magnetic data storage media, biomagnetic systems and magnetic ink used to print currency.
87 Citations
21 Claims
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1. A scanning magnetic microscope, comprising:
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a magnetic sensor for sensing a magnetic field generated by a specimen;
said magnetic sensor comprising at least two magnetic sensing units each defining a sensing axis, said sensing axes being disposed orthogonally to one another; andtranslation means for translating at least one of said magnetic sensor and said specimen relative to one another along a measurement axis that is not parallel to the sensing axis; further comprising means for maintaining said magnetic sensor in contact with a surface of said specimen during measurement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A scanning magnetic microscope, comprising:
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a magnetic sensor for sensing a magnetic field generated by a specimen;
said magnetic sensor comprising at least two magnetic sensing units each defining a sensing axis, said sensing axes being disposed orthogonally to one another; andtranslation means for translating at least one of said magnetic sensor and said specimen relative to one another along a measurement axis that is not parallel to the sensing axis; further comprising a lubricant reservoir that is translated with said magnetic sensor.
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10. A scanning magnetic microscope, comprising:
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a plurality of N magnetic sensors for sensing a magnetic field generated by a specimen;
said N magnetic sensors disposed transversely with respect to a measurement axis, whereby said magnetic field may be sensed at N locations simultaneously, N being an integer greater than one; andtranslation means for translating at least one of said magnetic sensor and said specimen along a measurement axis relative to a surface of said specimen, wherein each of the N magnetic sensors comprise at least two magnetic sensing units each defining a sensing axis, said sensing axes of each magnetic sensor being disposed orthogonally, to one another; further comprising means for maintaining at least one of said magnetic sensors in contact with a surface of said specimen during measurement. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A scanning magnetic microscope, comprising:
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a plurality of N magnetic sensors for sensing a magnetic field generated by a specimen;
said N magnetic sensors disposed transversely with respect to a measurement axis, whereby said magnetic field may be sensed at N locations simultaneously, N being an integer greater than one; andtranslation means for translating at least one of said magnetic sensor and said specimen along a measurement axis relative to a surface of said specimen, wherein each of the N magnetic sensors comprise at least two magnetic sensing units each defining a sensing axis, said sensing axes of each magnetic sensor being disposed orthogonally to one another; further comprising a lubricant reservoir that is translated with said magnetic sensor.
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19. A method of measuring a magnetic field comprising:
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providing a scanning magnetic microscope comprising at least one magnetic sensor, said sensor comprising at least two magnetic sensing units each defining a sensing axis, said sensing axes being disposed orthogonally to one another; applying a sense current to the magnetic sensor; translating the at least one sensor relative to a surface of a specimen along a measurement axis; and maintaining at least one of said magnetic sensors in contact with a surface of said specimen during measurement. - View Dependent Claims (20, 21)
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Specification