Solid state X-ray detector with improved spatial resolution

• US 7,145,986 B2
• Filed: 05/04/2004
• Issued: 12/05/2006
• Est. Priority Date: 05/04/2004
• Status: Active Grant

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Wear, James A., Washenko, Robert A.
• Primary Examiner(s): Ho, Allen C.
• Application Number:
  US10/838,893
• Publication Number:
  US 20050249331A1
• Time in Patent Office: 945 Days
• Field of Search: 378/19, 378/98.8, 250/363.1, 250/370.09, 250/370.1, 250/370.11, 250/370.12, 250/370.13
• US Class Current: 378/98.8
• CPC Class Codes: G01T 1/241 Electrode arrangements, e.g. continuous or parallel strips or the like constructional or manufacturing details H01L31/00
• CPC Class Codes: G01T 1/366 with semi-conductor detectors see provisionally also G01T1/36
• CPC Class Codes: H01L 27/14623 Optical shielding
• CPC Class Codes: H01L 27/14676 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 31/0296 including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe

Abstract

A monolithic detector uses a grid to block x-rays from inter-pixel regions such as are believed to cause electrical noise in the pixel signals.

Claims

1. A solid state x-ray detector comprising:

a monolithic x-ray detecting element having a front and rear surface;

at least one electrode attached to the front surface of the monolithic x-ray detecting element;

a plurality of electrodes attached to the rear surface of the monolithic x-ray detecting element and electrically separated by gutter regions, wherein the electrodes define areas corresponding to pixels in a reconstructed image and the gutter regions define areas where charge carriers are able to migrate unpredictably toward one of a variety of areas corresponding to one of a variety of pixels in the reconstructed image; and

an x-ray blocking mask attached to the front surface of the monolithic x-ray detecting element and having openings arranged opposite the plurality of electrodes on the rear surface and blocking elements arranged over the gutter regions to substantially block x-rays directed toward the front surface of the monolithic x-ray detecting element from entering an area on the front surface of the monolithic x-ray detecting element opposite the gutter regions.

2. The solid-state x-ray detector of claim 1 wherein the blocking elements are positioned and sized with respect to an x-ray source to cast an x-ray shadow substantially covering the entire gutter region.

3. The solid-state x-ray detector of claim 1 wherein the monolithic detecting element is selected from the group consisting of:

CZT, CdTe, and HgI₂.

4. The solid-state x-ray detector of claim 1 wherein the blocking mask is wider than the gutter regions to block x-rays from entering the area on the front surface of the monolithic x-ray detecting element opposite the gutter regions and an area on the front surface of the monolithic x-ray detecting element opposite an area flanking the gutter regions.

5. The solid state x-ray detector of claim 1 including an insulating layer positioned between the front surface of the monolithic x-ray detecting element and the x-ray blocking mask.

6. The solid-state x-ray detector of claim 5 wherein the insulating layer is configured to electrically isolate the at least one electrode from the x-ray blocking mask and provide substantially no x-ray attenuation.

7. The solid-state x-ray detector of claim 1 wherein the x-ray blocking mask includes tungsten.

8. The solid-state x-ray detector of claim 1 further including a readout circuit reading independent currents from each of the plurality of electrodes attached to the rear surface of the monolithic x-ray detecting element.

9. The solid-state x-ray detector of claim 1 wherein the plurality of electrodes attached to the rear surface of the monolithic x-ray detecting element are arranged in rectilinear columns and rows, and the blocking mask is a rectilinear grid.

10. The solid state x-ray detector of claim 1 wherein the plurality of electrodes attached to the rear surface of the monolithic x-ray detecting element are arranged in linear rows staggered along the rows by a fraction of a row width, and the blocking mask is a staggered grid having blocking elements following interfaces between the electrodes.

11. The solid state x-ray detector of claim 1 wherein the plurality of electrodes attached to the rear surface of the monolithic x-ray detecting element are arranged in linear rows staggered along the rows by a fraction of a row width and the blocking mask is strip positioned along an interface between rows.

12. The solid-state x-ray detector of claim 1 further comprising at least one steering electrode surrounding each of the plurality of electrodes attached to the rear surface of the monolithic element.

13. A quantitative bone densitometry machine comprising:

an x-ray source providing at least two energies of x-rays;

a solid-state x-ray detector arranged opposite the x-ray source and having;

1) a monolithic element having a front surface and rear surface;

2) at least one electrode attached to the front surface of the monolithic element;

3) a plurality of electrodes attached to the rear surface of the monolithic element and electrically separated from one another by areas forming gutter regions; and

4) an x-ray blocking mask attached to the front surface of the monolithic element and having a respective plurality of openings, each opening arranged on the front surface of the monolithic element opposite a corresponding electrodes on the rear surface of the monolithic element, and having blocking elements arranged on the front surface of the monolithic element opposite the areas separating the plurality of electrodes from one another forming gutter regions to substantially block x-rays traveling a path leading to an area on the front surface of the monolithic element opposite the areas separating the plurality of electrodes from one another forming gutter regions; and

measuring circuitry communicating with each of the plurality of electrodes to receive an electrical signal indicative of x-ray detection events and calculate a bone density measurement from the electrical signal by distinguishing the portions of the electrical signal corresponding to each of two energies of x-rays.

14. The quantitative bone densitometry machine of claim 13 wherein the blocking elements are positioned and sized with respect to an x-ray source to cast an x-ray shadow substantially covering the entire gutter region.

15. The quantitative bone densitometry machine of claim 13 wherein the monolithic element is selected from the group consisting of:

CZT, CdTe, and HgI₂.

16. The quantitative bone densitometry machine of claim 13 wherein the blocking mask is wider than the gutter regions to block x-rays from entering the area on the front surface of the monolithic x-ray detecting element opposite the gutter regions and an area on the front surface of the monolithic x-ray detecting element opposite an area flanking the gutter regions.

17. The quantitative bone densitometry machine of claim 13 including an insulating layer positioned between the monolithic element and the x-ray blocking mask.

18. The quantitative bone densitometry machine of claim 17 wherein the insulating layer is configured to electrically isolate the at least one electrode from the x-ray blocking mask and provide substantially no x-ray attenuation.

19. The quantitative bone densitometry machine of claim 13 wherein the x-ray blocking mask includes tungsten.

20. The quantitative bone densitometry machine of claim 13 further including a readout circuit reading independent currents from each of the plurality of electrodes attached to the rear surface of the monolithic element.

21. The quantitative bone densitometry machine of claim 13 wherein the plurality of electrodes attached to the rear surface of the monolithic element are arranged in rectilinear columns and rows, and the blocking mask is a rectilinear grid.

22. The quantitative bone densitometry machine of claim 13 wherein the plurality of electrodes attached to the rear surface of the monolithic element are arranged in linear rows staggered along the rows by a fraction of a row width, and the blocking mask is a staggered grid having blocking elements following an interface between the electrodes.

23. The quantitative bone densitometry machine of claim 13 wherein the plurality of electrodes attached to the rear surface of the monolithic element are arranged in linear rows staggered along the rows by a fraction of a row width and the blocking mask is a strip positioned along an interface between rows.

24. A solid-state x-ray detector comprising:

a monolithic x-ray detecting element having a front surface and rear surface;

at least one electrode positioned on the front surface of the monolithic x-ray detecting element;

a plurality of electrodes positioned on the rear surface of the monolithic x-ray detecting element;

a plurality of gutters electrically separating each of the plurality of electrodes positioned on the rear surface of the monolithic x-ray detecting element; and

an x-ray blocking mask arranged on the front surface of the monolithic x-ray detecting element and having blocking elements arranged opposite the gutters to substantially block x-rays traveling a path that would cause the x-rays to intersect the front surface of the monolithic x-ray detecting element in the area opposite the plurality of gutters, and wherein the blocking elements are separated by openings arranged on the front surface of the monolithic x-ray detecting element to form passages leading directly through the monolithic x-ray detecting element to the plurality of electrodes positioned on the rear surface of the monolithic x-ray detecting element.

25. The solid-state x-ray detector of claim 24 wherein at least one electrode positioned on the front surface is arranged between the x-ray blocking mask and the front surface of the monolithic x-ray detecting element.

26. The solid-state x-ray detector of claim 24 further comprising an insulating layer positioned between the monolithic x-ray detecting element and the x-ray blocking mask.

27. The solid-state x-ray detector of claim 24 further comprising at least one steering electrode surrounding each of the plurality of electrodes positioned on the rear surface of the monolithic x-ray detecting element.