Controller and method to mediate data collection from smart sensors for fab applications

• US 7,146,237 B2
• Filed: 04/07/2004
• Issued: 12/05/2006
• Est. Priority Date: 04/07/2004
• Status: Expired due to Fees

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Attwood, Mark, Lev-Ami, Uzi, Sifnatsch, Guenter
• Primary Examiner(s): Von Buhr, Maria N.
• Application Number:
  US10/819,903
• Publication Number:
  US 20050228529A1
• Time in Patent Office: 972 Days
• Field of Search: 700 28- 32, 700/52, 700108-111, 700117-121
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32181 Monitor production, assembly apparatus with multiple sensors
• CPC Class Codes: G05B 2219/37494 Intelligent sensor, data handling incorporated in sensor
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0221 Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Claims

1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:

identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;

recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;

transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and

receiving from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.

2. The method of claim 1, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed.

3. The method of claim 2, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested.

4. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to reduce data sensed from one or more semiconductor manufacturing devices, based on the context descriptions;

recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;

transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and

receiving from the particular smart sensors reduced data sensed by the smart sensors, responsive to the transmitted current context.

5. The method of claim 4, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed.

6. The method of claim 5, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested.

7. The method of claim 4, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network.

8. The method of claim 4, wherein the identifying includes loading identifying data into the controller.

9. The method of claim 4, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device.

10. The method of claim 9, wherein the semiconductor manufacturing device is a chamber of a multi-chamber cluster tool.

11. The method of claim 4, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device.

12. The method of claim 4, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device.

13. The method of claim 4, wherein the current context includes identification of a recipe step being carried out on the particular semiconductor manufacturing device.

14. The method of claim 4, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device.

15. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to calibrate their sensing of data from one or more semiconductor manufacturing devices, based on the context descriptions;

recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;

transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and

receiving from the particular smart sensors data, sensed by the smart sensors, calibrated responsive to the transmitted current context.

16. The method of claim 15, further including requesting that at least one specific smart sensor among the particular smart sensors provide additional detail from the data sensed.

17. The method of claim 16, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested.

18. The method of claim 15, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network.

19. The method of claim 15, wherein the identifying includes loading identifying data into the controller.

20. The method of claim 15, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device.

21. The method of claim 15, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device.

22. The method of claim 15, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device.

23. The method of claim 15, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device.

24. A controller adapted to monitoring processes or equipment performance in a semiconductor manufacturing operation, the controller including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with smart sensors; and

logic and resources operable with the processor, adapted to

identify a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;

recognize a current context of operation of a particular semiconductor manufacturing device;

transmit to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and

receive from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.

25. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;

analyzing at the controller the reduced data, responsive to the current context, and determining that additional detail should be requested; and

transmitting a request for the additional detail from the data sensed by at least one specific smart sensor.

26. The method of claim 25, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested.

27. The method of claim 25, further including prior to the receiving step:

recognizing in the controller the current context of operation of the particular semiconductor manufacturing device; and

transmitting to the one or more particular smart sensors the current context.

28. The method of claim 25, wherein the identifying includes discovery by the controller of the smart sensors, the controller and the smart sensors being coupled by a network.

29. The method of claim 25, wherein the identifying includes loading identifying data into the controller.

30. The method of claim 25, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device.

31. The method of claim 25, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device.

32. The method of claim 25, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device.

33. The method of claim 25, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device.

34. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with smart sensors; and

logic and resources operable with the processor, adapted to

receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;

analyze the reduced data, responsive to the current context, and determine that additional detail should be requested; and

transmit to at least one specific smart sensor a request for the additional detail from the data sensed.

35. A controller-aided method of monitoring equipment performance in a semiconductor manufacturing operation, the method including:

receiving at a controller reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;

providing a data user at least some of the reduced data and receiving from the data user an inquiry for additional detail; and

transmitting to at least one specific smart sensor a request for the additional detail from the data sensed.

36. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with smart sensors and a data user; and

logic and resources operable with the processor, adapted to

receive reduced data from one or more particular smart sensors associated with a particular semiconductor manufacturing device, the reduced data having been reduced from data sensed by the smart sensors responsive to a current context of operation of the particular semiconductor manufacturing device;

provide the data user at least some of the reduced data and receive from the data user an inquiry for additional detail; and

transmit to at least one specific smart sensor a request for the additional detail from the data sensed.

37. A controller-aided method of controlling equipment performance monitoring in a semiconductor manufacturing operation, the method including:

identifying to a controller capabilities of at least one smart sensor that is adapted

to recognize a plurality of context descriptions; and

to adapt its sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;

receiving at the smart sensor from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and

transmitting to the controller data sensed by the smart sensor, responsive to the received current context.

38. The method of claim 37, further including receiving a request from the controller to provide additional detail from the data sensed.

39. The method of claim 38, wherein the request identifies the additional detail requested specifically enough that the specific smart sensor can select among all additional detail available the additional detail requested.

40. The method of claim 37, further including reducing data sensed by the smart sensor responsive to the transmitted current context and prior to transmitting the data sensed.

41. The method of claim 37, further including calibrating the smart sensor responsive to the transmitted current context and prior to transmitting the data sensed.

42. The method of claim 37, wherein the current context includes identification of a process being conducted on the particular semiconductor manufacturing device.

43. The method of claim 37, wherein the current context includes identification of a current processing state of the particular semiconductor manufacturing device.

44. The method of claim 37, wherein the current context includes identification of a recipe being used on the particular semiconductor manufacturing device.

45. The method of claim 37, wherein the current context includes data identifying a wafer being processed by the particular semiconductor manufacturing device.

46. The method of claim 37, wherein the smart sensor includes a simple sensor and a smart adapter, wherein the smart adapter includes logic and resources adapted

to recognize a plurality of context descriptions;

and

to adapt the sensor'"'"'s sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions.

47. The method of claim 46, wherein the simple sensor is an incumbent sensor being adapted to respond to the current context received from the controller.

48. A smart sensor adapted to monitoring equipment performance in a semiconductor manufacturing operation, the smart sensor including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with at least one controller; and

logic and resources operable with the processor, adapted to

recognize a plurality of context descriptions and to adapt the smart sensors sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions;

receive from the controller a current context of operation of the semiconductor manufacturing device associated with the smart sensor; and

transmit to the controller data sensed by the smart sensor, responsive to the received current context.

49. The device of claim 48, wherein the smart sensor includes a simple sensor and a smart adapter, wherein the smart adapter includes the logic and resources adapted to recognize a plurality of context descriptions and to adapt the incumbent sensors sensing of data from an associated semiconductor manufacturing device responsive to the context descriptions.

50. The method of claim 49, wherein the simple sensor is an incumbent sensor being adapted to respond to the current context received from the controller.