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Controller and method to mediate data collection from smart sensors for fab applications

  • US 7,146,237 B2
  • Filed: 04/07/2004
  • Issued: 12/05/2006
  • Est. Priority Date: 04/07/2004
  • Status: Expired due to Fees
First Claim
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1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:

  • identifying in a controller a plurality of smart sensors that are configured to recognize a plurality of context descriptions and to adapt their sensing of data from one or more semiconductor manufacturing devices, responsive to the context descriptions;

    recognizing in the controller a current context of operation of a particular semiconductor manufacturing device;

    transmitting to one or more particular smart sensors associated with the particular semiconductor manufacturing device the current context; and

    receiving from the particular smart sensors data sensed by the smart sensors, responsive to the transmitted current context.

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  • 2 Assignments
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