Measuring probe with diaphragms and modules
First Claim
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1. A measuring probe, comprising:
- a base member;
a stylus holder to which a stylus is connected or connectable; and
a suspension system for the stylus holder, whereinthe suspension system comprises at least a pair of substantially planar elastic devices connected between the stylus holder and the base member, both of said planar elastic devices allowing limited movement of the stylus holder in a direction out of the planes thereof, andat least one of said planar elastic devices allowing limited transverse movement of the stylus holder in the plane of said at least one of said planar elastic device.
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Abstract
A measuring probe includes a suspension module 112 in which a stylus holder 140 is suspended from a housing on a pair of diaphragms 142,144. At least one of the diaphragms is formed with spiral cut-outs whereby the stylus, which is connected at the center of the diaphragms, is able to move transversely of the axis of the housing as the stylus holder pivots when transverse forces are applied to the stylus tip. A transducer module 110 is releasably supported on the suspension module by a kinematic mounting 116,118 and is retained in position by magnets 120. The transducer module contains optical transducers 200,210,220 for measuring the deflection of the stylus.
47 Citations
25 Claims
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1. A measuring probe, comprising:
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a base member; a stylus holder to which a stylus is connected or connectable; and a suspension system for the stylus holder, wherein the suspension system comprises at least a pair of substantially planar elastic devices connected between the stylus holder and the base member, both of said planar elastic devices allowing limited movement of the stylus holder in a direction out of the planes thereof, and at least one of said planar elastic devices allowing limited transverse movement of the stylus holder in the plane of said at least one of said planar elastic device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 17, 18, 19, 20, 21, 22)
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16. A measuring probe, comprising:
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a suspension module, including a base member, a stylus holder to which a stylus is connected or connectable, and a suspension system for the stylus holder whereby the stylus holder is movable relative to the base member; and a transducer module containing at least one transducer, converting into a signal the bodily movement of the stylus holder relative to the base member in the suspension module, the base member and the transducer module both having mutually engageable location elements whereby the suspension module and the transducer module are releasably connectable to each other so that the suspension module is exchangeable in use when performing measurement operations with a substitute suspension module having a different configuration.
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23. A measuring probe comprising:
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a suspension module, including a base member, a stylus holder to which a stylus is connected or connectable, and a suspension system for the stylus holder whereby the stylus holder is movable relative to the base member; and a transducer module containing at least one transducer measuring the bodily movement of the stylus holder relative to the base member in the suspension module, the base member and the transducer module both having mutually engageable location elements whereby the suspension module and the transducer module are releasably connectable to each other so that the suspension module is exchangeable in use when performing measurement operations, the base member, the stylus holder and the suspension system remaining connected as a module when disconnected from the transducer module, wherein the at least one transducer comprises a light source positioned to direct a light beam onto an optical element movable with the stylus and a position sensitive detector positioned to receive light returned from the optical element and derive a signal indicative of the stylus deflection. - View Dependent Claims (24, 25)
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Specification