Disposable and trimmable wireless pressure sensor
First Claim
1. A disposable pressure sensor, comprising:
- a substrate and a pressure diaphragm formed upon said substrate;
a sensor antenna connected to a capacitor formed on said substrate and surrounded by said pressure diaphragm; and
wherein said substrate is configured to include a gap in which a gel is located below a first bond layer and a PVDF layer formed thereon and wherein a second bond layer is formed above said PVDF layer followed by a layer of interdigital transducers, such that when said pressure diaphragm is exposed to a pressure, said diaphragm moves close to said PVDF layer or said capacitor, thereby resulting in an electric field change in said PVDF layer and at least one interdigital transducer among said layer of interdigital transducers to provide an indication of pressure.
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Accused Products
Abstract
A disposable pressure sensor includes a substrate and a pressure diaphragm formed upon the substrate. A sensor coil can be provided, comprising a capacitor and an inductor formed on the substrate and surrounded by the pressure diaphragm. The ferrite core is located proximate to the sensor coil, such that when the pressure diaphragm is exposed to a pressure, the diaphragm moves close to the inductor or the capacitor, thereby resulting in a change in the capacitor or the inductor and an indication of pressure. The capacitor can be implanted as an adjustable, trimmable or variable capacitor. The inductor may also be provided as an adjustable or variable inductor and can include the use of a variable capacitor and a PVDF based piezoelectric transducer. When the PVDF layer is under pressure, it can generate an electric field across the interdigital transducer and transmit a signal thereof through an antenna.
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Citations
20 Claims
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1. A disposable pressure sensor, comprising:
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a substrate and a pressure diaphragm formed upon said substrate; a sensor antenna connected to a capacitor formed on said substrate and surrounded by said pressure diaphragm; and wherein said substrate is configured to include a gap in which a gel is located below a first bond layer and a PVDF layer formed thereon and wherein a second bond layer is formed above said PVDF layer followed by a layer of interdigital transducers, such that when said pressure diaphragm is exposed to a pressure, said diaphragm moves close to said PVDF layer or said capacitor, thereby resulting in an electric field change in said PVDF layer and at least one interdigital transducer among said layer of interdigital transducers to provide an indication of pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A disposable pressure sensor, comprising:
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a substrate and a pressure diaphragm formed upon said substrate; a sensor antenna connected to a variable capacitor formed on said substrate and surrounded by said pressure diaphragm, wherein said variable capacitor is trimmed by a laser; and wherein said substrate is configured to include a gap in which a gel is located below a first bond layer and a PVDF layer formed thereon and wherein a second bond layer is formed above said PVDF layer followed by a layer of interdigital transducers, such that when said pressure diaphragm is exposed to a pressure, said diaphragm moves close to said PVDF layer or said variable capacitor, thereby resulting in an electric field change in said PVDF layer and at least one interdigital transducer among said layer of interdigital transducers to provide an indication of pressure, wherein said at least one interdigital transducer comprises a metal or a metal alloy. - View Dependent Claims (15, 16)
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17. A disposable pressure sensor, comprising:
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a substrate and a pressure diaphragm formed upon said substrate; a sensor antenna connected to a capacitor formed on said substrate and surrounded by said pressure diaphragm; a gap configured from said substrate, wherein a gel is located in said gap below a first bond layer and a PVDF layer formed thereon and wherein a second bond layer is formed above said PVDF layer followed by a layer of interdigital transducers, such that when said pressure diaphragm is exposed to a pressure, said diaphragm moves close to said PVDF layer or said capacitor, thereby resulting in an electric field change in said PVDF layer and at least one interdigital transducer among said layer of interdigital transducers to provide an indication of pressure; and wherein said at least one interdigital transducer comprises a metal or a metal alloy, wherein said metal alloy comprises binary, ternary or quadruple phase diagrams of metal or non-metal elements, and wherein the said at least one interdigital transducer collects energy from a piezoelectric effect associated with said PVDF layer. - View Dependent Claims (18, 19, 20)
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Specification