Mechanically latchable tiltable platform for forming micromirrors and micromirror arrays
First Claim
1. A microelectromechanical apparatus, comprising:
- (a) a platform supported above a substrate and electrostatically moveable from a first position parallel to the substrate to a second position wherein the platform is tilted at an angle to the substrate; and
(b) an electrostatically-operable latch mechanism formed on the substrate with a pivot arm extending substantially parallel to the substrate for engaging with a tab protruding from the platform in response to an applied latch actuation voltage, thereby mechanically latching the platform in the second position even after the applied latch actuation voltage is removed.
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Accused Products
Abstract
A microelectromechanical (MEM) apparatus is disclosed which includes a platform that can be electrostatically tilted from being parallel to a substrate on which the platform to being tilted at an angle of 1–20 degrees with respect to the substrate. Once the platform has been tilted to a maximum angle of tilt, the platform can be locked in position using an electrostatically-operable latching mechanism which engages a tab protruding below the platform. The platform has a light-reflective upper surface which can be optionally coated to provide an enhanced reflectivity and form a micromirror. An array of such micromirrors can be formed on a common substrate for applications including optical switching (e.g. for fiber optic communications), optical information processing, image projection displays or non-volatile optical memories.
75 Citations
36 Claims
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1. A microelectromechanical apparatus, comprising:
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(a) a platform supported above a substrate and electrostatically moveable from a first position parallel to the substrate to a second position wherein the platform is tilted at an angle to the substrate; and (b) an electrostatically-operable latch mechanism formed on the substrate with a pivot arm extending substantially parallel to the substrate for engaging with a tab protruding from the platform in response to an applied latch actuation voltage, thereby mechanically latching the platform in the second position even after the applied latch actuation voltage is removed. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 16)
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2. A microelectromechanical apparatus, comprising:
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(a) a platform supported above a substrate and electrostatically moveable from a first position parallel to the substrate to a second position wherein the platform is tilted at an angle to the substrate; and (b) an electrostatically-operable latch mechanism formed on the substrate and located beneath the platform for engaging with a tab protruding from the platform in response to an applied latch actuation voltage, thereby mechanically latching the platform in the second position even after the applied latch actuation voltage is removed.
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12. A microelectromechanical apparatus, comprising:
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(a) a platform supported above a substrate and electrostatically moveable from a first position parallel to the substrate to a second position wherein the platform is tilted at an angle to the substrate; and (b) an electrostatically-operable latch mechanism formed on the substrate and further comprising an electrostatic comb actuator having a pair of stationary electrostatic combs on the substrate on either side of a moveable electrostatic comb which is suspended above the substrate on a rotatable pivot arm that extends substantially parallel to the substrate for movement in a plane parallel to the plane of the substrate to engage a tab protruding from the platform in response to a latch actuation voltage applied to the electrostatic comb actuator, thereby mechanically latching the platform in the second position after the latch actuation voltage is removed, with each electrostatic comb further comprising a plurality of spaced apart fingers, and with the fingers of the stationary electrostatic comb being arranged between the fingers of the moveable electrostatic comb. - View Dependent Claims (13, 14, 15)
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17. A tiltable micromirror apparatus, comprising:
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(a) a substrate; (b) at least one micromirror supported above the substrate, with each micromirror being electrostatically tiltable from a first position parallel to the substrate to a second position at an angle to the substrate by a voltage applied between a first electrode formed on the substrate and a second electrode formed underneath the micromirror and connected thereto; and (c) an electrostatically-operable latch mechanism located proximate to each micromirror and engageable with a tab protruding from the micromirror to lock the micromirror in a tilted position with respect to the substrate, with the electrostatically-operable latch mechanism further comprising a pivot arm that is electrostatically moveable about a pivot to engage one end of the pivot arm with the tab attached to an underside of the micromirror to lock the micromirror in the tilted position. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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26. A tiltable micromirror apparatus, comprising:
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(a) a substrate; (b) a plurality of micromirrors supported above the substrate in an array, with each micromirror being electrostatically tiltable from a first position parallel to the substrate to a second position at an angle with respect to the substrate by a voltage applied between a first electrode formed on the substrate and a second electrode formed underneath the micromirror and connected thereto; and (c) an electrostatically operable latch mechanism located proximate to each micromirror and engageable with a tab protruding beneath the micromirror to lock the micromirror in the second position even after the voltage between the first and second electrodes is removed. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification