Optical coupling arrangement

• US 7,149,385 B2
• Filed: 04/11/2002
• Issued: 12/12/2006
• Est. Priority Date: 04/12/2001
• Status: Expired due to Fees

• Current Assignee: RPX Corporation
• Original Assignee: Nokia Corporation
• Inventors: Parikka, Marko, Turunen, Jari
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): WONG, ERIC K
• Application Number:
  US10/474,736
• Publication Number:
  US 20040109642A1
• Time in Patent Office: 1,706 Days
• Field of Search: 385/12, 385/37
• US Class Current: 385/37
• CPC Class Codes: G02B 6/1221 made from organic materials
• CPC Class Codes: G02B 6/34 utilising prism or grating G02B6/293 takes precedence
• CPC Class Codes: G02B 6/42 Coupling light guides with opto-electronic elements
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Abstract

The invention relates to a method and an apparatus for manufacturing an optical coupling arrangement, and a specific coupling arrangement. A substrate waveguide (306) and at least one coupling element (304, 306) in the coupling arrangement are made of polymer material in the same replication process at the same time. At least one diffractive coupling element (304, 306) is then formed in the polymer material by placing the polymer material against a replication mould, which comprises a surface profile model of at least one diffractive coupling element (304, 306) that is patterned into the replication mould by means of micro lithography.

Claims

1. A method for manufacturing an optical coupling arrangement comprising a substrate waveguide and at least one coupling element for coupling optical radiation between the substrate waveguide and the environment, the method comprising:

making both the substrate waveguide and at least one diffractive coupling element of polymer material at a same time in one replication process, the process comprising

forming both the substrate waveguide and at least one diffractive coupling element of the polymer material by placing the polymer material against a replication mould comprising a surface profile model of at least one diffractive coupling element that is patterned into the replication mould by means of micro lithography.

2. A method as claimed in claim 1, further comprising patterning the surface profile model of the diffractive coupling element into a pattern plate in the replication mould by means of micro lithography in such a manner that a resist spread upon a base provided for the surface profile model is patterned using radiation to conform to the diffractive coupling element and the pattern plate including the pattern of the diffractive coupling element is formed on the base using electrolysis.

3. A method as claimed in claim 1, further comprising patterning the model of the diffractive coupling element into a pattern plate in the replication mould by means of micro lithography in such a manner that the resist spread upon the base provided for the surface profile model is patterned using electron radiation, ionic radiation or optical radiation to conform to the diffractive coupling element and the pattern plate including the pattern of the diffractive coupling element is formed on the base using nickel electrolysis.

4. A method as claimed in claim 1, further comprising forming several optical channels into the waveguide substrate in more than one dimension and forming at least one diffractive coupling element for each channel.

5. An optical coupling arrangement comprising a substrate waveguide and at least one coupling element for coupling optical radiation between the substrate waveguide and the environment, wherein the substrate waveguide and at least one coupling element in the coupling arrangement are made of polymer material and manufactured at the same time in the same replication process, and

both the substrate waveguide and at least one diffractive coupling element of the substrate waveguide are simultaneously manufactured by placing the polymer material against a replication mould comprising a surface profile model of at least one diffractive coupling element that is patterned into the replication mould by means of micro lithography.

6. A coupling arrangement as claimed in claim 5, wherein the replication mould comprises a pattern plate on which a surface profile model of the diffractive coupling element is patterned by means of micro lithography in such a manner that a resist spread upon a base provided for the surface profile model is patterned using radiation to conform to the diffractive coupling element and the pattern plate including the pattern of the diffractive coupling element is formed on the base using electrolysis.

7. A coupling arrangement as claimed in claim 5, wherein the replication mould comprises a pattern plate on which a surface profile mode in the diffractive coupling element is patterned by means of micro lithography in such a manner that the resist spread upon the base provided for the surface profile model is patterned using electron radiation, ionic radiation or optical radiation to conform to the diffractive coupling element and the pattern plate including the pattern of the diffractive coupling element is formed on the base using nickel electrolysis.

8. A coupling arrangement as claimed in claim 5, wherein the waveguide substrate comprises optical channels in more than one dimension and each channel is provided with at least one diffractive coupling element.

9. An apparatus for manufacturing an optical coupling arrangement, the coupling arrangement comprising a substrate waveguide and at least one coupling element for coupling optical radiation between the waveguide structure and the environment, wherein the apparatus comprises a replication mould,

the replication mould is for polymer material,

the replication mould is for manufacturing the substrate waveguide at least one diffractive coupling element associated with the substrate waveguide at the same replication time,

the replication mould comprises a surface profile model of at least one diffractive coupling element,

the surface profile model of the diffractive coupling element is patterned into the replication mould by means of micro lithography, and

the apparatus is arranged to form both the substrate and at least one diffractive coupling element in the polymer material in the substrate waveguide by placing the polymer material of the substrate waveguide against the replication mould and the surface profile model.

10. An apparatus as claimed in claim 9, wherein the replication mould comprises a pattern plate patterned as the surface profile model into the replication mould by means of micro lithography, the pattern plate being manufactured in such a manner that a resist spread upon a base provided for the surface profile model is patterned using radiation to conform to the diffractive coupling element, and the pattern plate including the pattern of the diffractive coupling element is formed of the base using electrolysis.

11. An apparatus as claimed in claim 9, wherein the replication mould comprises a pattern plate patterned as the surface profile model into the replication mould by means of micro lithography, the pattern plate being manufactured in such a manner that a resist spread upon a base provided for the surface profile model is patterned using electron radiation, ionic radiation or optical radiation to conform to the diffractive coupling element, and the pattern plate including the pattern of the diffractive coupling element is formed of the base using nickel electrolysis.

12. An apparatus as claimed in claim 9, wherein the replication mould comprises a pattern plate as the surface profile model, on which the surface profile model in the diffractive coupling element is patterned, and the apparatus is arranged to press the pattern plate of the replication mould against the polymer material in order to form the diffractive coupling element.

13. An apparatus as claimed in claim 9, wherein the apparatus is arranged to form several optical channels to the waveguide substrate in more than one dimension and the apparatus is arranged to form at least one diffractive coupling element for each optical channel.