Pyramid socket suspension

• US 7,150,191 B2
• Filed: 02/06/2006
• Issued: 12/19/2006
• Est. Priority Date: 02/17/2004
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Foote, Steven A., Collins, Paul H., Milne, J. Christopher
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US11/348,764
• Publication Number:
  US 20060123907A1
• Time in Patent Office: 316 Days
• Field of Search: 734/93, 735/142.9, 735/143.7, 248/603, 257/727
• US Class Current: 73/514.29
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G01P 15/08 with conversion into electric or magnetic values
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements

Abstract

An apparatus and method for flexibly suspending a sensing mechanism between a pair of cover plates, including a sensing mechanism formed in a crystalline silicon substrate; a pair of cover plates formed in crystalline silicon substrates; a first plurality of complementary interfaces in fixed relation between the sensing mechanism and a first one of the cover plates; and a second plurality of complementary interfaces flexibly suspended between the sensing mechanism and a second one of the cover plates with one or more of the flexibly suspended interfaces being a complementary male and female interface.

Claims

1. A micro-machined electromechanical system (MEMS) device, comprising:

a plurality of crystalline wafers each having first and second substantially planar and parallel spaced apart opposing surfaces;

first and second clamshell covers formed in first and second ones of the crystalline wafers, the clamshell covers each comprising a substantially planar base portion surrounded by upright peripheral wall portions;

a micro-machined electromechanical sensing mechanism formed in a third one of the crystalline wafers, the sensing mechanism comprising a frame portion sized to fit within the upright peripheral wall portions of the first and second clamshell covers and a proof mass formed within the frame portion and flexibly suspended therefrom;

a first plurality of complementary interfaces positioned between the frame portion of the sensing mechanism and the base portion of the first clamshell cover and being fixed relative to one of the frame portion and the first clamshell cover; and

a second plurality of complementary male projection and female socket interfaces positioned between the frame portion of the sensing mechanism and the base portion of the second clamshell cover and being flexibly suspended relative to one of the frame portion and the second clamshell cover.

2. The device of claim 1 wherein one of the second plurality of complementary interfaces further comprises a truncated pyramid shaped male projection interfaced with a complementary female socket.

3. The device of claim 1 wherein each of the second plurality of complementary interfaces further comprises a flexible Z-shaped suspension bracket.

4. The device of claim 1 wherein the second plurality of complementary interfaces further comprises a plurality of flexible suspension brackets formed in the second clamshell cover.

5. The device of claim 1 wherein the second plurality of complementary interfaces further comprises a plurality of flexible suspension brackets formed in the frame portion of the mechanism.

6. The device of claim 1 wherein the first plurality of complementary interfaces further comprises a plurality of mesas interfaced with a plurality of complementary flats.

7. The device of claim 6 wherein the plurality of mesas further comprise a reference plane relative to the first clamshell cover.

8. An apparatus for flexibly suspending a sensing mechanism between a pair of cover plates, the apparatus comprising:

first, second and third crystalline wafers each having first and second substantially planar and parallel spaced apart opposing surfaces;

a micro-machined electromechanical force sensing mechanism formed in the first crystalline substrate, the sensing mechanism being formed with a relatively stationary frame portion substantially surrounding an operational portion thereof formed as a proof mass flexibly suspended within the frame portion;

a pair of cover plates formed in the second and third crystalline substrates and mounted on either side of the sensing mechanism and interfaced with the frame portion thereof;

a plurality of flat tipped male projections and complementary flats interfaced between the frame portion of the sensing mechanism and the first cover plate;

a plurality of male projections and complementary female indentations flexibly suspended between the flame portion or the sensing mechanism and the second cover plate; and

a bond joint between the pair of cover plates.

9. The apparatus of claim 8 wherein one of the male projections further comprises a truncated pyramid-shaped projection, and the complementary female indentation corresponding thereto further comprises a mating truncated pyramidal shaped recess.

10. The apparatus of claim 9 wherein each of the truncated pyramid-shaped projection and complementary mating truncated pyramidal shaped recess further comprise substantially identical slopes.

11. The apparatus of claim 10 wherein each of the first, second and third crystalline waters further comprises an atomic lattice structure, and

the slopes of each of the truncated pyramid-shaped projection and complementary mating truncated pyramidal-shaped recess substantially follow the atomic lattice structure.

12. The apparatus of claim 10 wherein each of the first, second and third crystalline wafers further comprises crystalline silicon.

13. The apparatus of claim 10 wherein:

the first cover plate further comprises the plurality of flat tipped male projections interfaced with the complementary flats;

the frame portion of the sensing mechanism further comprises the complementary flats;

the second cover plate further comprises the plurality of male projections interfaced with the complementary female indentations; and

the frame portion of the sensing mechanism further comprises the complementary female indentations.

14. The apparatus of claim 10 wherein each of the pair of cover plates further comprises a cavity formed by a base and a wall extended along the edges of the base, the walls of the pair of cover plates interconnected along a centerline of the sensing mechanism to form a cavity for housing the sensing mechanism,

the base of the first cover plate further comprises the plurality of flat tipped male projections interfaced with the complementary flats,

the first surface of the sensing mechanism further comprises the complementary flats,

the base of the second cover plate further comprises the plurality of male projections interfaced with the complementary female indentations, and

the second surface of the sensing mechanism further comprises the complementary female indentations;

and

further comprising a bond joining the walls of the pair of cover plates.

15. The apparatus of claim 10 wherein:

the frame portion of the sensing mechanism further comprises the plurality of flat tipped male projections interfaced with the complementary flats;

the first cover plate further comprises the complementary flats;

the frame portion of the sensing mechanism further comprises the plurality of male projections interfaced with the complementary female indentations; and

the second cover plate further comprises the complementary female indentations.

16. An apparatus for flexibly suspending a sensing mechanism between a pair of cover plates, the apparatus comprising:

a pair of cover plates formed in respective crystalline silicon substrates each formed with a base surrounded by walls, an inner surface of the base of a first of the cover plates being formed with a plurality of flat tipped male projections, and an inner surface of the base of a second of the cover plates being formed with a plurality of male truncated pyramid-shaped projections; and

a micro-machined electromechanical force sensing mechanism formed in a crystalline silicon substrate, the sensing mechanism having a proof mass flexibly suspended from a frame portion thereof with the frame portion having a first surface formed with a plurality of flats each complementary to one of the plurality of flat tipped male projections formed on the inner surface of the base of a first cover plate, and a second surface formed with a plurality of female truncated pyramidal-shaped indentations each complementary to one of the plurality of male truncated pyramid-shaped projections.

17. The apparatus of claim 16 wherein each of the truncated pyramid-shaped projection and complementary mating truncated pyramidal-shaped indentations further comprise substantially identically sloped walls.

18. The apparatus of claim 17, further comprising a flexible suspension bracket flexibly suspending one or more of the plurality of male truncated pyramid-shaped projections relative to the base of the second of the cover plate.

19. The apparatus of claim 18 wherein the flexible suspension bracket further comprises a Z-shaped flexible suspension bracket having the male truncated pyramid-shaped projection positioned approximately midline thereof.

20. The apparatus of claim 16 wherein a plurality of the male truncated pyramid-shaped projections are distributed in a regular pattern at spaced apart locations on the inner surface of the base of the second of the cover plates.