Controlling method for manufacturing process comprising determining a priority of manufacturing process needing recovery in response to degree of risk

• US 7,151,974 B2
• Filed: 02/22/2005
• Issued: 12/19/2006
• Est. Priority Date: 04/20/2001
• Status: Expired due to Fees

• Current Assignee: LAPIS Semiconductor Co., Ltd. (ROHM Co., Ltd.)
• Original Assignee: OKI Electric Industry Company Limited
• Inventors: Hayashi, Shunji
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Jarrett, Ryan
• Application Number:
  US11/061,813
• Publication Number:
  US 20050143849A1
• Time in Patent Office: 665 Days
• Field of Search: 700/73, 700/101, 700/110
• US Class Current: 700/101
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31477 Display correlated data so as to represent the degree of correlation
• CPC Class Codes: G05B 2219/32221 Correlation between defect and measured parameters to find origin of defect
• CPC Class Codes: G06Q 10/10 Office automation; Time management
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

In a method of controlling a manufacturing process, operating conditions of plural process steps are monitored during the manufacturing process. A degree of risk is calculated for each of a malfunction operating condition step and subsequent steps. The degree of risk is classified into plural levels and is determined in accordance with a risk point on the basis of the minimum WIP, actual WIP, target WIP, and a weighting factor. A priority of the manufacturing process needing recovery is determined in response to the degree of risk, and an operating condition of the manufacturing process is controlled in response to the priority determination.

Claims

1. A method of controlling a manufacturing process, comprising:

monitoring operating conditions of plural process steps during the manufacturing process;

calculating a degree of risk for each of a malfunction operating condition step and subsequent steps, in accordance with selected data from plural manufacturing control parameters preliminarily obtained under a normal operating condition of the manufacturing process;

determining a priority of the manufacturing process needing recovery in response to the degree of risk for each of the malfunction operating condition step and subsequent steps; and

controlling an operating condition of the manufacturing process responsive to said determining,

wherein the degree of risk is classified into plural levels and is determined in accordance with a risk point on the basis of the following parameters;

WIP minimum, WIP actual, WIP target and a weighting factor, wherein WIP is work in progress.

2. The method according to claim 1, further comprising:

storing information being controlled by a control method for the manufacturing process, into a host computer through a local area network, wherein the information is accessible from a plurality of servers through an intranet.

3. The method according to claim 1, wherein the risk point is determined as follows:

Risk point=weighting factor×

(WIP target−

WIP actual)/(WIP target−

WIP minimum).

4. The method according to claim 1, wherein the degree of risk is classified into six levels.