Micro-electromechanical valve having transformable valve actuator
First Claim
1. A micro-electromechanical valve comprising:
- a channel defined by a substrate and by circuitry on the substrate so as to terminate at an aperture;
a closure member arranged to be displaceable between first and second positions at which the aperture is respectively covered and uncovered and fluid is respectively inhibited and permitted from flowing through the channel; and
an elongate actuator for displacing the closure member between the first and second positions, the actuator anchored at one end to the substrate and connected to the closure member at the other end,wherein a portion of the actuator is in electrical contact with the circuitry, the portion being configured to transform between straightened and arcuate shapes when respectively heated and cooled by respective receipt and withdrawal of electrical current from the circuitry, the actuator displacing the closure member between the first and second positions in response to the transformation of the portion;
wherein the aperture defines an aperture plane, and wherein movement of the actuator between the first and second positions is in a plane substantially parallel to the aperture plane.
2 Assignments
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Accused Products
Abstract
A micro-electromechanical valve is provided having a channel defined by a substrate and circuitry thereon so as to terminate at an aperture, a closure member arranged to be displaceable between first and second positions at which the aperture is respectively covered and uncovered and fluid is respectively inhibited and permitted from flowing through the channel, and an elongate actuator for displacing the closure member between the first and second positions. One end of the actuator is anchored to the substrate and the other end is connected to the closure member. A portion of the actuator in electrical contact with the circuitry is configured to transform between straightened and arcuate shapes when respectively heated and cooled by respective receipt and withdrawal of electrical current from the circuitry. The actuator displaces the closure member between the first and second positions in response to the transformation of the portion.
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Citations
6 Claims
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1. A micro-electromechanical valve comprising:
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a channel defined by a substrate and by circuitry on the substrate so as to terminate at an aperture; a closure member arranged to be displaceable between first and second positions at which the aperture is respectively covered and uncovered and fluid is respectively inhibited and permitted from flowing through the channel; and an elongate actuator for displacing the closure member between the first and second positions, the actuator anchored at one end to the substrate and connected to the closure member at the other end, wherein a portion of the actuator is in electrical contact with the circuitry, the portion being configured to transform between straightened and arcuate shapes when respectively heated and cooled by respective receipt and withdrawal of electrical current from the circuitry, the actuator displacing the closure member between the first and second positions in response to the transformation of the portion; wherein the aperture defines an aperture plane, and wherein movement of the actuator between the first and second positions is in a plane substantially parallel to the aperture plane. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification