Method of cleaning semiconductor wafer

• US 7,153,370 B2
• Filed: 01/19/2005
• Issued: 12/26/2006
• Est. Priority Date: 02/10/2001
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Lee, Kun-tack, Hah, Sang-rok, Han, Yong-pil
• Primary Examiner(s): EL ARINI, ZEINAB
• Application Number:
  US11/037,257
• Publication Number:
  US 20050121053A1
• Time in Patent Office: 706 Days
• Field of Search: 134/2, 134/3, 134/30, 134/33, 134/36, 134/37, 134/902, 134/26
• US Class Current: 134/2
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

The present application discloses a method of cleaning a semiconductor wafer by mounting a wafer to a chuck, positioning a gas guard, defining therein a chamber having an open bottom, immediately above the layer of water, spraying de-ionized water onto the wafer while rotating the chuck at a location outside the chamber when the wafer is mounted to the chuck, to thereby form a layer of water on the wafer, and spraying a cleaning gas from a gas spraying unit disposed above said chuck through the chamber and into the layer of water to thereby cause the cleaning gas to dissolve in the layer of water, and at the same time moving the chamber across a surface of the wafer, to thereby clean the wafer, wherein said gas spraying unit includes a gas injection tube oriented to inject the cleaning gas towards the wafer mounted to the chuck, and the gas guard connected to the gas injection tube.

Claims

1. A method of cleaning a semiconductor wafer, comprising:

mounting a wafer to a chuck;

spraying de-ionized water onto the wafer while rotating the chuck, to thereby form a layer of substantially only water on a surface of the wafer;

positioning a gas guard, defining therein a chamber having an open bottom, immediately above the layer of water; and

spraying a cleaning gas through the chamber and into the layer of substantially only water to thereby cause the cleaning gas to dissolve in the layer of water, and at the same time moving the chamber across the surface of the wafer, to thereby clean the wafer.

2. The method of claim 1, wherein the cleaning gas is selected from the group of gases consisting of ozone (O₃), hydrofluoric acid (HF), ammonia (NH₃), carbon dioxide (CO₂), sulfur oxide (SO₂), hydrogen (H₂), and a combination of the gases.

3. The method of claim 1, wherein said positioning of the gas guard comprises maintaining the bottom of the gas guard at a distance of 2–

4 mm above the layer of water while the cleaning gas is sprayed.

4. The method of claim 1, wherein a pressure within the chamber is maintained between 1–

2 atm.

5. The method of claim 1, wherein the chuck is rotated at 5–

100 rpm from the time the layer of water is formed through the time the cleaning gas is sprayed.

6. The method of claim 1, and further comprising subsequently injecting a drying gas onto the layer of water on the cleaned wafer, to thereby dry the cleaned wafer.

7. The method of claim 6, wherein the drying gas is isopropyl alcohol.

8. The method of claim 7, wherein the chuck is rotated at 5–

1500 rpm while the wafer is being dried by the isopropyl alcohol.

9. A method of cleaning a semiconductor wafer, comprising:

mounting a wafer to a chuck;

spraying de-ionized water onto the wafer while rotating the chuck, to thereby form a layer of water on a sufface of the wafer;

subsequently moving a gas guard, defining therein a chamber having an open bottom, to a position immediately above the layer of water; and

spraying a cleaning gas through the chamber and into the layer of water to thereby cause the cleaning gas to dissolve in the layer of water, and at the same time moving the chamber across the surface of the wafer, to thereby clean the wafer.

10. The method of claim 9, wherein the cleaning gas is selected from the group of gases consisting of ozone (O₃), hydrofluoric acid (HF), ammonia (NH₃), carbon dioxide (CO₂), sulfur oxide (SO₂), hydrogen (H₂), and a combination of the gases.

11. The method of claim 9, and further comprising subsequently injecting a drying gas onto the layer of water on the cleaned wafer, to thereby dry the cleaned wafer.

12. The method of claim 11, wherein the drying gas is isopropyl alcohol.

13. A method of cleaning a semiconductor wafer, comprising:

mounting a wafer to a chuck;

positioning a gas guard, defining therein a chamber having an open bottom, immediately above a surface of the wafer;

subsequently spraying deionized water onto the surface of the wafer at a location outside of the chamber defined by the gas guard to thereby form a layer of water on the wafer; and

spraying a cleaning gas through the chamber and into the layer of water to thereby cause the cleaning gas to dissolve in the layer of water, and at the same time moving the chamber across the surface of the wafer, to thereby clean the wafer.

14. The method of claim 13, wherein the cleaning gas is selected from the group of gases consisting of ozone (O₃), hydrofluoric acid (HF), ammonia (NH₃), carbon dioxide (CO₂), sulfur oxide (SO₂), hydrogen (H₂), and a combination of the gases.

15. The method of claim 13, and further comprising subsequently injecting a drying gas onto the layer of water on the cleaned wafer, to thereby dry the cleaned wafer.

16. The method of claim 15, wherein the drying gas is isopropyl alcohol.