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Electro-optical device and driving method for the same

  • US 7,154,147 B1
  • Filed: 06/02/1999
  • Issued: 12/26/2006
  • Est. Priority Date: 11/26/1990
  • Status: Expired due to Fees
First Claim
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1. An active matrix liquid crystal display device comprising:

  • a glass substrate;

    an underlying insulating film formed on said glass substrate;

    a pixel circuit and a driving circuit formed on said underlying insulating film;

    at least one thin film transistor formed in said pixel circuit, said thin film transistor having a semiconductor layer comprising source drain and channel regions;

    an insulating film comprising an inorganic material formed on said thin film transistor;

    an organic resin film over said insulating film; and

    a pixel electrode formed over said organic resin film and connected to said thin film transistor through an opening provided in said organic resin film,wherein said semiconductor layer exhibits a peak of Raman spectra, displaced from a peak of single crystalline silicon to the lower frequency direction,wherein said underlying insulating film contains halogen.

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