Method of manufacturing a sensor element having integrated reference pressure

• US 7,155,803 B2
• Filed: 02/10/2004
• Issued: 01/02/2007
• Est. Priority Date: 02/20/1997
• Status: Expired due to Fees

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Jonsson, Staffan
• Primary Examiner(s): TUGBANG, ANTHONY D
• Application Number:
  US10/774,493
• Publication Number:
  US 20040211262A1
• Time in Patent Office: 1,057 Days
• Field of Search: 295/95, 296/11, 296/13, 29/254.1, 295/94, 737/15, 737/18, 737/24, 445/31, 445/41, 445/55, 252/181.1, 252/181.2, 252/181.3, 219/604, 438/402, 438/471, 438/FOR.144, 392/345, 392/346
• US Class Current: 29/595
• CPC Class Codes: G01L 9/0044 Constructional details of non-semiconductive diaphragms
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: Y10T 29/43 Electric condenser making
• CPC Class Codes: Y10T 29/49007 Indicating transducer
• CPC Class Codes: Y10T 29/49083 Heater type

Abstract

A pressure sensor includes a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated body, maintaining the exterior heated body in direct contact with the getter for a predetermined period of time, and removing the exterior heated body.

Claims

1. A method of producing a pressure sensor utilizing a pressure sensor house assembly which contains a reference cavity, the method comprising the steps of:

placing a thermally activatable getter in the pressure sensor house assembly so that the thermally activatable getter has a free surface open to the exterior;

providing a vacuum in the reference cavity;

then moving a solid body connected to a heat source from a position exterior of the reference cavity into direct mechanical contact with said free surface of the getter that is open to the exterior;

thereupon activating, for a predetermined period of time, the heat source to conduct heat through the solid body to the getter in order to activate the getter; and

finally removing the heat source from being connected to the solid body.

2. The method of claim 1, wherein, in the step of activating the heat source, heat is also conducted to seal the pressure sensor house assembly with the solid body.

3. The method of claim 2, wherein, before the step of moving the solid body, a sealing adhesive which is capable of being thermally activated is applied to the solid body in order to attach and seal the solid body to the pressure sensor house assembly.

4. The method of claim 1, wherein, in the direct mechanical contact of the solid body with said surface of the getter, the getter is allowed to move elastically.

5. The method of claim 1, wherein the pressure sensor house assembly comprises a connection channel from the reference cavity to a recess in which the getter is placed and wherein:

in the step of providing a vacuum, air is pumped out of the reference cavity via the connection channel;

in the step of moving the solid body, the solid body is moved to be located at the opening of the recess in order to act as a lid closing the connection channel; and

in the step of activating the heat source and conducting heat to the solid body, heat is also conducted to seal the solid body to walls of the recess, thereby sealing the pressure sensor house assembly and the reference cavity from the exterior.

6. The method of claim 1, comprising the further steps of:

producing the pressure sensor house assembly from substantially ceramic material having the reference cavity arranged therein and a single closing channel from a main portion of the reference cavity to a mouth at the outside;

pumping air out of a room containing the pressure sensor house assembly, so that a vacuum is obtained therein and in the reference cavity;

arranging a glass joint material on a closing lid, the glass joint material being capable of being thermally activated;

heating the closing lid and placing the closing lid over the mouth of the closing channel; and

allowing the closing lid to cool.

7. The method of claim 1, wherein, in the step of placing a thermally activatable getter in the pressure sensor house assembly, the thermally activatable getter is placed in a recess open to the exterior and connected to the reference cavity.

8. The method of claim 7, wherein, in placing the thermally activatable getter in the recess, the getter is placed to come in contact with a spring located at a bottom of the recess.

9. The method of claim 1, wherein, in the step of moving the solid body, the solid body is moved to come in direct mechanical contact only at flat surface with said free surface of the getter.

10. A method of producing a pressure sensor comprising a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and furthermore comprising a getter capable of being thermally activated, the method comprising first activating the setter by directly contacting the getter with an exterior solid body that is for only a predetermined period of time heated via a heat source so that heat is conducted from the exterior solid body to the getter and so that also the pressure sensor house assembly is sealed with the exterior solid body, wherein, in the step of activating the getter, the exterior solid body is releasably attached to a heating probe, the heating probe released from the exterior solid body after said predetermined period of time.