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Rotation sensing apparatus and method for manufacturing the same

  • US 7,155,976 B2
  • Filed: 01/05/2005
  • Issued: 01/02/2007
  • Est. Priority Date: 01/05/2005
  • Status: Expired due to Fees
First Claim
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1. A rotation sensing apparatus, comprising:

  • at least a pair of vibration parts disposed on a substrate symmetrically, each vibration part comprises;

    an electrostatic vibrating body, which is a conductor and is away from the substrate with an appropriate distance, the electrostatic vibrating body is electrically connected to a driving circuit;

    a fixed support, which connects with the electrostatic vibrating body and the substrate;

    an elastic body, which connects the fixed support with some rods thereof and connects with the electrostatic vibrating body with some other rods thereof; and

    a sensing electrode disposed on the substrate and under the at least pair of vibration parts, wherein the electrostatic vibrating body further comprises a plurality of mass bodies separated with each other and disposed on the electrostatic vibrating body.

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