Micro angular rate sensor
First Claim
1. An angular rate sensing device comprising:
- a base;
a vibrator having a ring and a plurality of proof masses, arranged in the base, wherein the plurality of proof masses are parallel electrodes; and
a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base.
1 Assignment
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Accused Products
Abstract
A micro angular rate-sensing device is provided. A vibrator, having a plurality of proof masses connected to a ring, is arranged in a first base. Flexible supporting members connect to the vibrator to suspend the vibrator in the first base. Electrodes drive the vibrator to oscillate and control the oscillation mode of the vibrator in driving mode. Planar electrodes are arranged relative to the proof masses on a second base. The motion of the proof masses relative to the planar electrodes is sensed through the capacitance between the proof masses and the planar electrodes. The resonant structure with greater mass of the device generates greater Coriolis force and increases the sensing area. Thus, the intensity of sensed signals and noise-signal ratio are greatly increased. Furthermore, the device does not rely much on high aspect ratio manufacturing technology. Thus the manufacturing cost is reduced and the yield rate is increased.
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Citations
50 Claims
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1. An angular rate sensing device comprising:
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a base; a vibrator having a ring and a plurality of proof masses, arranged in the base, wherein the plurality of proof masses are parallel electrodes; and a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An angular rate sensing device comprising:
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a base; a vibrator having a ring and a plurality of proof masses, arranged in the base, wherein the plurality of proof masses are parallel electrodes; and a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and a plurality of electrodes for driving and controlling the vibrator to oscillate such that the oscillation mode of the vibrator in driving mode may be controlled. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An angular rate sensing device comprising:
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a base; a vibrator having a ring and a plurality of proof masses, arranged in the base, wherein the plurality of proof masses are parallel electrodes; a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and a plurality of planar electrodes arranged relative to the proof masses, for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. An angular rate sensing device comprising:
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a first base and a second base; a vibrator having a ring and a plurality of proof masses, arranged in the first base, wherein the plurality of proof masses are parallel electrodes and connected to the vibrator; a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the first base; a plurality of electrodes for controlling and driving the vibrator to oscillate such that the oscillation mode of the vibrator in driving mode may be controlled; and a plurality of planar electrodes on the second base and arranged relative to the proof masses for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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Specification