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Infrared monitor and control for vapor hydrogen peroxide processing techniques

  • US 7,157,045 B2
  • Filed: 07/09/2002
  • Issued: 01/02/2007
  • Est. Priority Date: 07/10/2001
  • Status: Active Grant
First Claim
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1. A peroxy vapor system including:

  • a light source which supplies light with at least a component in the mid-infrared range;

    a detector which individually detects mid-infrared range light in (a) a first narrow mid-infrared spectrum absorbed by peroxy vapor and not absorbed by the carrier vapor, (b) a second narrow mid-infrared spectrum absorbed by a carrier vapor and not absorbed by the peroxy vapor, and (c) a third mid-infrared spectrum absorbed by neither the peroxy vapor nor the carrier vapor; and

    a processor for determining at least a concentration of the peroxy vapor from the detected light only in the mid-infrared range.

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