Thin-film battery devices and apparatus for making the same
First Claim
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1. A thin-film, rechargeable battery device, comprising:
- a substrate;
a seed layer of a first material adjacent to the substrate;
a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the seed layer assists formation of desired crystal structures;
an electrolyte second film adjacent to the first film; and
a third film adjacent to the electrolyte second film.
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Abstract
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.
251 Citations
28 Claims
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1. A thin-film, rechargeable battery device, comprising:
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a substrate; a seed layer of a first material adjacent to the substrate; a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the seed layer assists formation of desired crystal structures; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A thin-film, rechargeable battery device, comprising:
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a substrate; a seed layer of a first material adjacent to the substrate; a first film of a second material formed on the seed layer, wherein the second material is different from the first material, and wherein the seed layer assists formation of desired crystal structures; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film, wherein both the first film and the second film are formed of lithium intercalation material such that the energy-storage device includes a lithium ion rechargeable battery.
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23. A thin-film, rechargeable battery device, comprising:
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a substrate; means for seeding growth of a crystalline structure adjacent to the substrate; a first film formed on the means for seeding growth of the crystalline structure, wherein the first film has the crystalline structure and is of a material different from the means for seeding growth of the crystalline structure; an electrolyte second film adjacent to the first film; and a third film adjacent to the electrolyte second film. - View Dependent Claims (24, 25, 26, 27, 28)
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Specification