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Ozone vapor clean method

  • US 7,157,351 B2
  • Filed: 05/20/2004
  • Issued: 01/02/2007
  • Est. Priority Date: 05/20/2004
  • Status: Expired due to Fees
First Claim
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1. A method of forming a uniform thickness oxide film on a surface, comprising the steps of:

  • providing an ozone vapor by mixing water vapor with ozone;

    cleaning said surface; and

    then contacting said surface with said ozone vapor to form a first oxide film on said surface;

    then, forming a second oxide film on said first oxide film.

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