Large field of view protection optical system with aberration correctability for flat panel displays
First Claim
Patent Images
1. An exposure system, comprising:
- a reticle stage adapted to support a reticle that is configured to pattern a beam of radiation;
a substrate stage adapted to support a substrate;
a reflective optical system adapted to direct the patterned beam onto said substrate, said reflective optical system comprising a primary mirror including a first mirror and a second mirror, and a secondary mirror;
a first optical device including a parallel glass plate, a parallel glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the reticle stage and the primary mirror; and
a second optical device including a parallel glass plate, a parallel glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the substrate stage and the primary mirror.
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Abstract
An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.
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Citations
77 Claims
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1. An exposure system, comprising:
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a reticle stage adapted to support a reticle that is configured to pattern a beam of radiation; a substrate stage adapted to support a substrate; a reflective optical system adapted to direct the patterned beam onto said substrate, said reflective optical system comprising a primary mirror including a first mirror and a second mirror, and a secondary mirror; a first optical device including a parallel glass plate, a parallel glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the reticle stage and the primary mirror; and a second optical device including a parallel glass plate, a parallel glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the substrate stage and the primary mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. An exposure system for manufacturing flat panel displays (FPDs) comprising:
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a substrate stage adapted to support an FPD substrate; a reflective optical system adapted to image a reticle onto said FPD substrate, said reflective optical system consisting of a first mirror, a second mirror, and a third mirror as its powered reflective elements, wherein said reflective optical system has at least 10 degrees of freedom when projecting an image of the reticle onto the FPD substrate by reflections off the first mirror, the second mirror, and the third mirror. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
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61. A system, comprising:
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a mask that patterns a beam of radiation; a projection optical system for projecting the patterned beam onto a substrate, said projection optical system including a first concave mirror, a second concave mirror and a convex mirror; a first optical device including a glass plate, a glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the reticle stage and the projection optical system; and a second optical device including a glass plate, a glass plate and meniscus lens pair, a nominally flat mirror with an aspheric profile, or a powered mirror located between the substrate stage and the projection optical system. - View Dependent Claims (62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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Specification