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Optical scanning observation apparatus

  • US 7,158,234 B2
  • Filed: 03/25/2004
  • Issued: 01/02/2007
  • Est. Priority Date: 10/31/2001
  • Status: Expired due to Fees
First Claim
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1. A scanning observation apparatus comprising:

  • a low-coherence light source;

    light separating means for separating light emitted from the low-coherence light source into an observation light and a reference light;

    an observation light optical path for transmitting the observation light;

    a reference light optical path for transmitting the reference light;

    optical path length variation means provided on at least one of either the observation light optical path or the reference light optical path;

    converging means provided at a proximal end of the light separating means;

    a light-receiving optical system for photo-reception of light, emitted from the converging means and irradiated on an object of measurement, which has been reflected or scattered;

    an observation light return optical path for transmitting light received by the light-receiving optical system;

    light joining means for joining the observation light return optical path and the reference light optical path;

    light detecting means for converting light from the light joining means into electric signals;

    image-forming means for generating an image of the object to be observed from the signals detected by the light detecting means;

    display means for displaying an image;

    optical scanning means for scanning light on the object to be measured;

    light transmission state changing means provided on the reference light optical path, for changing the transmission efficiency of the reference light of the reference light optical path;

    a reference member capable of changing a distance from a position where irradiation of light is received from the converging means;

    focal position detecting means for determining a position relating to the reference member and the converging means, based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and the transmission efficiency of the reference light optical path is reduced; and

    optical path length adjusting means for operating the optical path length variation means based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and interference occurs at the light joining means, such that the optical length of the optical path from the light separating means and passing through the observation light optical path, the converging means, the reference member position determined by the focal position detecting means, the light-receiving optical system, the observation light return optical path, and the light joining means, and that of the reference light optical path, substantially accord.

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