Optical scanning observation apparatus
First Claim
1. A scanning observation apparatus comprising:
- a low-coherence light source;
light separating means for separating light emitted from the low-coherence light source into an observation light and a reference light;
an observation light optical path for transmitting the observation light;
a reference light optical path for transmitting the reference light;
optical path length variation means provided on at least one of either the observation light optical path or the reference light optical path;
converging means provided at a proximal end of the light separating means;
a light-receiving optical system for photo-reception of light, emitted from the converging means and irradiated on an object of measurement, which has been reflected or scattered;
an observation light return optical path for transmitting light received by the light-receiving optical system;
light joining means for joining the observation light return optical path and the reference light optical path;
light detecting means for converting light from the light joining means into electric signals;
image-forming means for generating an image of the object to be observed from the signals detected by the light detecting means;
display means for displaying an image;
optical scanning means for scanning light on the object to be measured;
light transmission state changing means provided on the reference light optical path, for changing the transmission efficiency of the reference light of the reference light optical path;
a reference member capable of changing a distance from a position where irradiation of light is received from the converging means;
focal position detecting means for determining a position relating to the reference member and the converging means, based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and the transmission efficiency of the reference light optical path is reduced; and
optical path length adjusting means for operating the optical path length variation means based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and interference occurs at the light joining means, such that the optical length of the optical path from the light separating means and passing through the observation light optical path, the converging means, the reference member position determined by the focal position detecting means, the light-receiving optical system, the observation light return optical path, and the light joining means, and that of the reference light optical path, substantially accord.
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Accused Products
Abstract
Before performing observation with an optical scanning probe using a low-coherence light source and the like, a shutter is inserted in a reference light side optical path to create a state wherein interference light does not occur, in which state a reference member is set to a focal position of a converging optical system such that the output of a light detector is maximal by moving the reference member by a driving device at an observation light optical path side of an optical scanning probe, following which the shutter is opened, and the position of a mirror at the reference light side is moved and set such that the output of the light detecting means is maximal, thereby enabling the optical scanning observation apparatus to be set to a state of suitable optical properties, easily and smoothly.
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Citations
23 Claims
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1. A scanning observation apparatus comprising:
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a low-coherence light source; light separating means for separating light emitted from the low-coherence light source into an observation light and a reference light; an observation light optical path for transmitting the observation light; a reference light optical path for transmitting the reference light; optical path length variation means provided on at least one of either the observation light optical path or the reference light optical path; converging means provided at a proximal end of the light separating means; a light-receiving optical system for photo-reception of light, emitted from the converging means and irradiated on an object of measurement, which has been reflected or scattered; an observation light return optical path for transmitting light received by the light-receiving optical system; light joining means for joining the observation light return optical path and the reference light optical path; light detecting means for converting light from the light joining means into electric signals; image-forming means for generating an image of the object to be observed from the signals detected by the light detecting means; display means for displaying an image; optical scanning means for scanning light on the object to be measured; light transmission state changing means provided on the reference light optical path, for changing the transmission efficiency of the reference light of the reference light optical path; a reference member capable of changing a distance from a position where irradiation of light is received from the converging means; focal position detecting means for determining a position relating to the reference member and the converging means, based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and the transmission efficiency of the reference light optical path is reduced; and optical path length adjusting means for operating the optical path length variation means based on signals detected by the light detecting means, in a state wherein the light transmission state changing means is operated and interference occurs at the light joining means, such that the optical length of the optical path from the light separating means and passing through the observation light optical path, the converging means, the reference member position determined by the focal position detecting means, the light-receiving optical system, the observation light return optical path, and the light joining means, and that of the reference light optical path, substantially accord. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for setting a scanning observation apparatus comprising:
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providing a low-coherence light source; providing a light separating means for separating light emitted from the low-coherence light source into an observation light and a reference light; providing an observation light optical path for transmitting the observation light; providing a reference light optical path for transmitting the reference light; providing an optical path length variation means provided on at least one of either the observation light optical path or the reference light optical path; providing a converging means provided at a proximal end of the light separating means; providing a light-receiving optical system for photo-reception of light, emitted from the converging means and irradiated on an object of measurement, which has been reflected or scattered; providing a light joining means for joining an observation light return optical path for transmitting light received by the light-receiving optical system, the observation light return optical path, and the reference light optical path; providing a light detecting means for converting light from the light joining means into electric signals; providing an image-forming means for generating an image of the object to be observed from the signals detected by the light detecting means; providing a display means for displaying an image; and providing an optical scanning means for scanning light on the object to be measured; a first step for reducing the transmission efficiency of the reference light optical path; a second step for making reference to the output of the light detecting means with regard to the reference member, and positioning the reference member near the focal position of the converging means; a third step for restoring the transmission efficiency of the reference light optical path; and a fourth step wherein, with an optical length of the optical path from the light separating means and passing through the observation light optical path, the converging means, the reference member position determined by the focus position detecting means, the light-receiving optical system, the observation light return optical path, and the light joining means, as an optical path A in a state wherein positioning of the reference member is determined in the second step, the electric signals detected by the light detecting means are referred to, the optical path variation means are operated, and the optical length of the optical path A and the reference light optical path are substantially in accord.
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Specification