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System and method for calibrating a spatial light modulator array using shearing interferometry

  • US 7,158,238 B2
  • Filed: 06/13/2005
  • Issued: 01/02/2007
  • Est. Priority Date: 01/29/2004
  • Status: Expired due to Fees
First Claim
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1. A system for calibrating a spatial light modulator comprising:

  • a plurality of pixels in an object plane;

    a projection optical system that images the pixels onto an image plane;

    an interferometer that generates an interference pattern in the image plane; and

    a controller that modulates the pixels.

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