X-ray crystal orientation measuring method and X-ray crystal orientation measuring apparatus

• US 7,158,609 B2
• Filed: 09/14/2004
• Issued: 01/02/2007
• Est. Priority Date: 10/14/2003
• Status: Expired due to Fees

• Current Assignee: Rigaku Corporation
• Original Assignee: Rigaku Corporation
• Inventors: Usui, Makoto, Kikuchi, Tetsuo, Inago, Yoshio, Uematsu, Toshio
• Primary Examiner(s): Thomas; Courtney
• Assistant Examiner(s): Yun; Jurie
• Application Number:
  US10/939,471
• Publication Number:
  US 20050078790A1
• Time in Patent Office: 840 Days
• Field of Search: 378 70- 73
• US Class Current: 378/73
• CPC Class Codes: G01N 23/205 using diffraction cameras

Abstract

An X-ray crystal orientation measuring apparatus and a method thereof, for enabling to measure distribution of crystal orientations upon a crystal having the sub-grain structure, lineage structure, other than the single domain, with using X-ray, comprises, an XY stage 20 for mounting a crystal S to be measured thereon and being movable in X-Y directions, an X-ray generating device 50 for irradiating X-ray at a predetermined angle upon a measuring surface of the crystal to be measured on the stage, a high-sensitive two-dimensional detector 60 for detecting the diffraction image of X-ray, which is irradiated from the X-ray generating device upon the measuring surface of the crystal to be measured, and a control PC, wherein the control PC calculates out a central position of the diffraction image detected, from the detected screen, so as to calculate out the crystal orientation upon the measuring surface of the crystal to be measured.

Claims

1. An X-ray crystal orientation measuring method, comprising:

irradiating X-rays upon a measuring surface of a crystal to be measured, at a predetermined angle;

detecting a diffraction pattern corresponding to a lattice plane of the crystal obtained through irradiation of said X-rays, by means of a two-dimension detector; and

measuring a central position exclusively of a central spot of said diffraction pattern, and

calculating a normal line of a lattice plane of said crystal on a basis of said position of said central spot for determining a crystal orientation of a measuring surface of said crystal.

2. The X-ray crystal orientation measuring method, as claimed in claim 1, wherein the measuring is executed at plural locations on the measuring surface of the crystal to be measured, thereby measuring a distribution of crystal orientations on the measuring surface of said crystal.

3. The X-ray crystal orientation measuring method, as claimed in claim 1, wherein the central spots obtained through the irradiating of said X-rays upon the measuring surface of said crystal to be measured, are Laue spots.

4. The X-ray crystal orientation measuring method, as claimed in claim 1, wherein the irradiating irradiates continuous X-rays upon the measuring surface of the crystal to be measured.

5. An X-ray crystal orientation measuring apparatus for detecting a crystal orientation on a measuring surface of a crystal to be measured using X-ray radiation, comprising:

a sample mounting means for mounting a crystal to be measured thereon, and being movable in a horizontal direction;

means for irradiating X-ray radiation at a predetermined angle upon the measuring surface of said crystal to be measured, where said crystal is mounted on said sample mounting means;

means for detecting a diffraction pattern of the X-ray radiation irradiated from said irradiating means upon the measuring surface of said crystal using a two-dimensional detector; and

means for calculating the crystal orientation of the measuring surface of said crystal from said diffraction pattern, wherein the crystal orientation is determined from a central position of exclusively a central one of the spots of the diffraction pattern detected by said detection means.

6. The X-ray crystal orientation measuring apparatus, as claimed in claim 5, wherein the spots detected by said detecting means, are Laue spots.

7. The X-ray crystal orientation measuring apparatus, as claimed in claim 5, wherein said detecting means is at least partially movable to allow a camera length thereof to be adjustable.

8. The X-ray crystal orientation measuring apparatus, as claimed in claim 5, wherein said irradiating means and said detecting means are arranged, so that an irradiation angle of the X-ray radiation and a detection angle of the X-ray radiation are equal to each other with respect to the measuring surface of said crystal to be measured.

9. The X-ray crystal orientation measuring apparatus, as claimed in claim 5, wherein said irradiating means and said detecting means are movable in a direction of a normal line to the measuring surface of said crystal to be measured.

10. The X-ray crystal orientation measuring apparatus, as claimed in claim 5, wherein the irradiating means irradiates continuous X-ray radiation upon the measuring surface of the crystal to be measured.

11. An X-ray crystal orientation measuring apparatus for detecting a crystal orientation on a measuring surface of a crystal to be measured using X-ray radiation, comprising:

a sample mounting table to mount a crystal to be measured thereon, and being movable in a horizontal direction;

an X-ray generator to irradiate X-ray radiation at a predetermined angle upon the measuring surface of said crystal to be measured;

a detector unit to detect a diffraction pattern of the X-ray radiation irradiated from said X-ray generator upon the measuring surface of said crystal using a two-dimensional detector; and

a calculating unit to calculate the crystal orientation of the measuring surface of said crystal from said diffraction pattern, wherein the crystal orientation is determined from a central position of exclusively a central one of the spots of the diffraction pattern detected by said detector unit.

12. The X-ray crystal orientation measuring apparatus, as claimed in claim 11, wherein the spots detected by said detector unit, are Laue spots.

13. The X-ray crystal orientation measuring apparatus, as claimed in claim 11, wherein said detector unit is at least partially movable to allow a camera length thereof to be adjustable.

14. The X-ray crystal orientation measuring apparatus, as claimed in claim 11, wherein said X-ray generator and said detector unit are arranged, so that an irradiation angle of the X-ray radiation and a detection angle of the X-ray radiation are equal to each other with respect to the measuring surface of said crystal to be measured.

15. The X-ray crystal orientation measuring apparatus, as claimed in claim 11, wherein said X-ray generator and said detector unit are movable in a direction of a normal line to the measuring surface of said crystal to be measured.

16. The X-ray crystal orientation measuring apparatus, as claimed in claim 11, wherein the X-ray generator is adapted to selectably irradiate continuous X-ray radiation upon the measuring surface of the crystal to be measured.