Slit valve for a semiconductor processing system
First Claim
1. A slit valve, comprising:
- a first wall defining a slot;
a second wall generally opposing the first wall, wherein the first wall and the second wall define at least a portion of a passage sized and adapted for transfer of a semiconductor substrate through the passage, the passage having an opening extending between and defined by the slot and the second wall;
an actuator plate movably disposed within the slot, the actuator plate having an open position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a closed position in which the actuator plate substantially entirely blocks the opening of the passage; and
a protective cover sized to substantially prevent debris within the passage from entering the slot when the actuator plate is in the open position.
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Accused Products
Abstract
A slit valve for a semiconductor processing apparatus, for fluidly sealing a passage connecting two chambers of the apparatus, such as a substrate reaction chamber and a region outside the reaction chamber. The slit valve comprises an actuator plate movable within a slot in one wall of the passage, the actuator plate and the slot oriented generally transverse to the passage. The actuator plate has a first position in which the valve is open, permitting the transfer of a substrate through the passage. The actuator plate also has a second position in which the valve is closed, and in which the actuator plate fluidly seals the passage such that fluid cannot flow through the passage across the actuator plate. A protective cover is configured to prevent debris within the passage (e.g., broken wafers, shards, particulate contaminants, etc.) from flowing into the slot when the actuator plate occupies its second position. In one embodiment, the cover is pivotably secured to the first wall of the passage, proximate the slot. In another embodiment, the cover is secured to the actuator plate, proximate an end thereof. In a preferred embodiment, the cover comprises a plate.
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Citations
20 Claims
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1. A slit valve, comprising:
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a first wall defining a slot; a second wall generally opposing the first wall, wherein the first wall and the second wall define at least a portion of a passage sized and adapted for transfer of a semiconductor substrate through the passage, the passage having an opening extending between and defined by the slot and the second wall; an actuator plate movably disposed within the slot, the actuator plate having an open position in which the actuator plate permits transfer of a substrate through the passage, the actuator plate also having a closed position in which the actuator plate substantially entirely blocks the opening of the passage; and a protective cover sized to substantially prevent debris within the passage from entering the slot when the actuator plate is in the open position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor processing apparatus including a slit valve, the slit valve comprising:
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a passage sized and adapted for transfer of a semiconductor substrate therethrough; an elongated slot; an actuator plate comprising a generally planar portion configured to pass through the slot, the actuator plate configured to translate within the slot between a first position in which the actuator plate permits transfer of a substrate through the passage and a second position in which the planar portion of the actuator plate substantially prevents flow through the passage; and a plate configured to selectively cover the slot when the actuator plate occupies its first position. - View Dependent Claims (11, 12)
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13. An apparatus for processing a semiconductor substrate, comprising:
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a chamber configured to enclose a semiconductor substrate; a region outside the chamber; a passage connecting the chamber and said region, at least a portion of the passage having a generally uniform cross-section sized and configured for transferring a substrate through said portion of the passage between the chamber and said region, said portion of the passage having first and second walls generally opposing one another, the first wall having a slot oriented generally transverse to said portion of the passage, the portion of the passage extending on either side of the slot; an actuator plate translatable within the slot in the first wall, the actuator plate having a first position in which the actuator plate permits transfer of a substrate from said region through said portion of the passage into the chamber, the actuator plate also having a second position in which the actuator plate extends into and substantially blocks said portion of the passage; and a protective cover on the actuator plate proximate an end of the actuator plate, the cover configured to substantially prevent debris within the passage from entering the slot when the actuator plate occupies its first position. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification