Method of forming carbon nanotube emitters and field emission display (FED) including such emitters

• US 7,160,169 B2
• Filed: 11/03/2004
• Issued: 01/09/2007
• Est. Priority Date: 11/24/2003
• Status: Expired due to Fees

• Current Assignee: Samsung SDI Company Limited
• Original Assignee: Samsung SDI Company Limited
• Inventors: Park, Shang-Hyeun
• Primary Examiner(s): Williams; Joseph
• Assistant Examiner(s): Dong; Dalei
• Application Number:
  US10/979,139
• Publication Number:
  US 20050112983A1
• Time in Patent Office: 797 Days
• Field of Search: 445 49- 51
• US Class Current: 445/51
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01J 2201/30469 Carbon nanotubes (CNTs)
• CPC Class Codes: H01J 9/025 of field emission cathodes

Abstract

A method of forming carbon nanotube emitters and a method of manufacturing an FED using such carbon nanotube emitters includes: forming a carbon nanotube layer on a substrate on which a plurality of electrodes are formed, coating a photoresist on the carbon nanotube layer, patterning the photoresist such that the photoresist only remains above the electrodes, removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as a etch mask, and removing the photoresist pattern and forming the carbon nanotube emitters on the electrodes.

Claims

1. A method of manufacturing carbon nanotube emitters, the method comprising:

forming a carbon nanotube layer on a substrate on which a plurality of electrodes are formed;

coating a photoresist on the carbon nanotube layer;

patterning the photoresist such that the photoresist only remains above the electrodes;

removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as a etch mask; and

removing the patterned photoresist and forming the carbon nanotube emitters on the electrodes.

2. The method of claim 1, wherein the carbon nanotube layer is formed by coating a mixture of solvent and carbon nanotubes on the electrodes and the substrate.

3. The method of claim 2, wherein the mixture of solvent and carbon nanotubes is coated by either a spin coating method or a table coating method.

4. The method of claim 1, wherein the carbon nanotube layer is etched by a reaction ion etching method.

5. The method of claim 4, wherein the carbon nanotube layer is etched by plasma processing under an oxygen atmosphere.

6. A method of manufacturing a Field Emission Device (FED) comprising:

sequentially forming a cathode, an insulating layer, and a gate electrode on a substrate;

forming an emitter aperture exposing a portion of the cathode by etching the insulating layer and the gate electrode;

forming a carbon nanotube layer on the gate electrode, the insulating layer, and the cathode;

coating a photoresist on the carbon nanotube layer;

patterning the photoresist such that the photoresist remains in only a central portion at the bottom of the emitter aperture;

removing an exposed portion of the carbon nanotube layer by etching using the patterned photoresist as an etch mask; and

removing the patterned photoresist and forming carbon nanotube emitters on the cathode in the emitter aperture.

7. The method of claim 6, wherein the carbon nanotube layer is formed by coating a mixture of solvent and carbon nanotubes on the entire surface of the substrate.

8. The method of claim 7, wherein the mixture of solvent and carbon nanotubes is coated by either a spin coating method or a table coating method.

9. The method of claim 6, wherein the carbon nanotube layer is etched by a reaction ion etching method.

10. The method of claim 9, wherein the carbon nanotube layer is etched by plasma processing under an oxygen atmosphere.