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Purification of hydride gases

  • US 7,160,360 B2
  • Filed: 12/08/2003
  • Issued: 01/09/2007
  • Est. Priority Date: 12/08/2003
  • Status: Expired due to Term
First Claim
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1. In a process for purifying a hydride gas by removing contaminant oxygen from said hydride gas which comprises the step of contacting said hydride gas with a reduced metal oxide, the improvement which comprises:

  • contacting said hydride gas with a reduced metal oxide carried on a porous support, wherein the reduced metal oxide carried on the porous support is selected from the group consisting of manganese oxide impregnated on porous carbon, manganese oxide impregnated on porous activated alumina, an alkali metal oxide impregnated on porous activated alumina, and an alkaline earth metal oxide impregnated on porous activated alumina.

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