Purification of hydride gases

• US 7,160,360 B2
• Filed: 12/08/2003
• Issued: 01/09/2007
• Est. Priority Date: 12/08/2003
• Status: Expired due to Term

• Current Assignee: Versum Materials US, LLC (Merck & Co., Inc.)
• Original Assignee: Air Products and Chemicals Incorporated (Linde Plc)
• Inventors: Dong, Chun Christine, Golden, Timothy Christopher, Wu, Dingjun, Battavio, Paula Jean
• Primary Examiner(s): Hopkins; Robert A.
• Application Number:
  US10/730,506
• Publication Number:
  US 20050120877A1
• Time in Patent Office: 1,128 Days
• Field of Search: 95117-123, 951/26, 951/38, 951/39, 95900-902, 951/261, 961/08, 961/34, 961/35, 961/53, 96142-144, 961/54, 423/219, 423/220, 423/230, 423/231, 502/416, 502/417, 502/428
• US Class Current: 95/117
• CPC Class Codes: B01D 53/02 by adsorption, e.g. preparative gas chromatography solid sorbent compositions B01J20/00, preparation of inorganic compounds or elements C01
• CPC Class Codes: B01J 20/041 Oxides or hydroxides
• CPC Class Codes: B01J 20/06 comprising oxides or hydroxides of metals not provided for in group B01J20/04
• CPC Class Codes: B01J 20/08 comprising aluminium oxide or hydroxide; comprising bauxite
• CPC Class Codes: B01J 20/103 comprising silica
• CPC Class Codes: B01J 20/18 Synthetic zeolitic molecular sieves
• CPC Class Codes: B01J 20/20 comprising free carbon; comprising carbon obtained by carbonising processes
• CPC Class Codes: B01J 20/28057 Surface area, e.g. B.E.T specific surface area
• CPC Class Codes: B01J 20/3204 Inorganic carriers, supports or substrates
• CPC Class Codes: B01J 20/3236 containing metal, other than zeolites, e.g. oxides, hydroxides, sulphides or salts
• CPC Class Codes: B01J 20/3289 Coatings involving more than one layer of same or different nature
• CPC Class Codes: B01J 2220/42 Materials comprising a mixture of inorganic materials materials coated or impregnated on a carrier B01J20/32
• CPC Class Codes: C01B 21/0455 characterised by the adsorbent
• CPC Class Codes: C01B 2203/042 Purification by adsorption on solids
• CPC Class Codes: C01B 2203/0465 Composition of the impurity
• CPC Class Codes: C01B 2203/0475 the impurity being carbon dioxide
• CPC Class Codes: C01B 2203/0495 the impurity being water
• CPC Class Codes: C01B 2210/0042 Making ultrapure specific gas
• CPC Class Codes: C01B 2210/0045 Oxygen
• CPC Class Codes: C01B 2210/0051 Carbon dioxide
• CPC Class Codes: C01B 2210/0062 : Water
• CPC Class Codes: C01B 23/0057 : characterised by the adsorbent
• CPC Class Codes: C01B 25/06 : Hydrogen phosphides
• CPC Class Codes: C01B 3/56 : by contacting with solids; Regeneration of used solids C01B3/508 takes precedence
• CPC Class Codes: C01B 33/046 : Purification
• CPC Class Codes: C01B 6/34 : Purification; Stabilisation
• CPC Class Codes: C01C 1/024 : Purification
• CPC Class Codes: Y10S 95/90 : Solid sorbent
• CPC Class Codes: Y10S 95/901 : Activated carbon

Abstract

Purification material for removing a contaminant from an impure hydride gas comprising an adsorbent comprising a reduced metal oxide on a porous support and a desiccant. The porous support may be selected from the group consisting of activated carbon, alumina, silica, zeolite, silica alumina, titania, zirconia, and combinations thereof. The reduced metal oxide may comprise one or more metals selected from the group consisting of Group I alkali metals (lithium, sodium, potassium, rubidium, and cesium), Group II alkaline earth metals (magnesium, calcium, strontium, and barium), and transition metals (manganese, nickel, zinc, iron, molybdenum, tungsten, titanium, vanadium, cobalt, and rhodium). The desiccant may be selected from the group consisting of hygroscopic metal salts, zeolites, single metal oxides, mixed metal oxides, and combinations thereof.

Claims

1. In a process for purifying a hydride gas by removing contaminant oxygen from said hydride gas which comprises the step of contacting said hydride gas with a reduced metal oxide, the improvement which comprises:

contacting said hydride gas with a reduced metal oxide carried on a porous support, wherein the reduced metal oxide carried on the porous support is selected from the group consisting of manganese oxide impregnated on porous carbon, manganese oxide impregnated on porous activated alumina, an alkali metal oxide impregnated on porous activated alumina, and an alkaline earth metal oxide impregnated on porous activated alumina.

2. The process of claim 1 wherein the alkali metal is selected from the group consisting of cesium, potassium and sodium.

3. The process of claim 1 wherein a desiccant is employed to assist in the removal of water, if generated, in the removing of the contaminant oxygen.

4. The process of claim 1 wherein the metal oxide is manganese oxide and the manganese oxide is impregnated on activated alumina.

5. The process of claim 1 wherein the metal oxide is manganese oxide, the manganese oxide is impregnated on a carbon support, and a desiccant is included to remove any water that may be generated during the removing of the contaminant oxygen.