Process and apparatus for obtaining bulk monocrystalline gallium-containing nitride

• US 7,160,388 B2
• Filed: 05/17/2002
• Issued: 01/09/2007
• Est. Priority Date: 06/06/2001
• Status: Expired due to Term

• Current Assignee: Ammono Sp. Z O.O., Nichia Corporation
• Original Assignee: Ammono Sp. Z O.O., Nichia Corporation
• Inventors: Kanbara, Yasuo, Garczy ski, Jerzy, Doradzi ski, Roman Marek, Sierzputowski, Leszek Piotr, Dwili ski, Robert Tomasz
• Primary Examiner(s): Kunemund; Robert
• Assistant Examiner(s): Song; Matthew
• Application Number:
  US10/147,319
• Publication Number:
  US 20020189531A1
• Time in Patent Office: 1,698 Days
• Field of Search: 117/11, 117/73, 117/74, 117/76, 117/78, 117/81, 117/213, 117/952
• US Class Current: 117/68
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: C30B 7/00 Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions from molten solvents C30B9/00; by normal or gradient freezing C30B11/00; under a protective fluid C30B27/00
• CPC Class Codes: C30B 7/10 by application of pressure, e.g. hydrothermal processes
• CPC Class Codes: H01S 5/0281 Coatings made of semiconductor materials
• CPC Class Codes: H01S 5/32341 blue laser based on GaN or GaP
• CPC Class Codes: Y10T 117/10 Apparatus
• CPC Class Codes: Y10T 117/102 for forming a platelet shape or a small diameter, elongate, generally cylindrical shape [e.g., whisker, fiber, needle, filament]
• CPC Class Codes: Y10T 117/1024 for crystallization from liquid or supercritical state

Abstract

The present invention refers to an ammonobasic method for preparing a gallium-containing nitride crystal, in which gallium-containing feedstock is crystallized on at least one crystallization seed in the presence of an alkali metal-containing component in a supercritical nitrogen-containing solvent. The method can provide monocrystalline gallium-containing nitride crystals having a very high quality.

Claims

1. A process for obtaining a bulk monocrystalline gallium-containing nitride in an autoclave having a gallium-containing feedstock in one zone, a seed in another zone and a supercritical solvent containing ions of alkali metals therein, said process comprising the steps of:

dissolving the gallium-containing feedstock in the supercritical solvent to form a supercritical solution at a first temperature; and

crystallizing the bulk monocrystalline gallium-containing nitride from the supercritical solution on the seed at a second temperature higher than the first temperature at which the feedstock dissolves in the supercritical solvent.

2. The process according to claim 1, wherein said step of dissolving the gallium-containing feedstock includes dissolving the gallium-containing feedstock in a dissolution zone and transferring the supercritical solution to the another zone at the second temperature.

3. The process according to claim 1, further comprising the steps of substantially simultaneously creating at least two zones of different temperatures in the autoclave.

4. The process according to claim 3, wherein the another zone is a crystallization zone and further comprising the step of controlling the temperature difference between the dissolution zone and the crystallization zone so as to ensure chemical transport in the supercritical solution.

5. The process according to claim 4, wherein said step of controlling the temperature difference includes allowing convection in the autoclave for chemical transport in the supercritical solution.

6. The process according to claim 4, wherein said step of controlling the temperature difference between the dissolution zone and the crystallization zone inside the autoclave includes controlling the temperature difference so that it is greater than 1°

C.

7. The process according to claim 1, wherein said step of crystallizing gallium-containing nitride includes crystallizing a gallium-containing nitride having the form of Al_xGa_1-x-yIn_yN, where 0≦

x<

1, 0≦

y<

1, 0≦

x+y<

1.

8. The process according to claim 1, further comprising the step of providing the supercritical solvent including at least one of NH₃ and its derivatives in the autoclave.

9. The process according to claim 1, further comprising the step of providing the supercritical solvent including at least potassium ions in the autoclave.

10. The process according to claim 1, further comprising the step of providing the gallium-containing feedstock including at least one of a gallium-containing nitride and its precursors in the autoclave.

11. The process according to claim 10, wherein said step of providing the gallium-containing feedstock includes providing precursors selected from a group consisting of azides, imides, amido-imides, amides, hydrides, metallic compounds and gallium-containing alloys, and metallic gallium.

12. The process according to claim 1, further comprising providing the seed having at least a crystalline layer of at least one of a gallium-containing nitride and other elements of Group XIII.

13. The process according to claim 1, further comprising the step of providing the seed having at least a crystalline layer of gallium-containing nitride with a dislocation density below 10⁶/cm².

14. The process according to claim 1, wherein said step of crystallizing at a second temperature includes crystallizing at temperatures from 100 to 800°

C.

15. The process according to claim 14, wherein said step of crystallizing at a second temperature includes crystallizing at temperatures from 400 to 600°

C.

16. The process according to claim 15, wherein said step of crystallizing at a second temperature includes crystallizing at temperatures from 450 to 550°

C.

17. The process according to claim 1, wherein said step of crystallizing includes crystallizing at pressures from 100 to 10000 bar.

18. The process according to claim 17, wherein said step of crystallizing includes crystallizing at pressures from 1000 to 5000 bar.

19. The process according to claim 18, wherein said step of crystallizing includes crystallizing at pressures from 1500 to 3000 bar.

20. The process according to claim 1, further comprising the step of controlling the content of alkali metal ions in the supercritical solvent so as to provide adequate levels of solubility of the feedstock and the gallium-containing nitride.

21. The process according to claim 1, further comprising the step of controlling the molar ratio of the alkali-metal ions to the remaining components in the supercritical solvent within a range of 1:

200 to 1;

2.

22. The process according to claim 21, further comprising the step of controlling the molar ratio of the alkali-metal ions to the remaining components in the supercritical solvent within a range of 1:

50 to 1;

5.

23. The process according to claim 22, further comprising the step of controlling the molar ratio of the alkali-metal ions to the remaining components in the supercritical solvent within a range of 1:

20 to 1;

5.

24. A process for preparing a bulk monocrystalline gallium-containing nitride crystal in an autoclave, which comprises the steps of (i) providing a supercritical ammonia solution containing ions of alkali metal and gallium in a soluble form by introducing a gallium-containing feedstock to supercritical ammonia solvent containing ions of alkali metals, in which solubility of gallium-containing nitride shows a negative temperature coefficient in said supercritical ammonia solution, and (ii) crystallizing said gallium-containing nitride selectively on a crystallization seed from said supercritical ammonia solution by means of the negative temperature coefficient of solubility.

25. A process for preparing a bulk monocrystalline gallium-containing nitride in an autoclave according to claim 24, wherein said gallium-containing nitride is GaN.

26. A process for preparing a bulk monocrystalline gallium-containing nitride in an autoclave according to claim 24, wherein said ion of alkali metal is selected from the group consisting of Li⁺, Na⁺, and K⁺.

27. A process for preparing a bulk monocrystalline gallium-containing nitride in an autoclave according to claim 24, wherein said ions of alkali metals are introduced in the form of mineralizers selected from alkali metals and compounds thereof, such as azides, nitrides, amides, amido-imides, imides, and/or hydrides, for forming an ammono-basic supercritical ammonia solution, which does not contain ions of halogens.

28. A process for preparing a bulk monocrystalline gallium-containing nitride in an autoclave according to claim 24, wherein said gallium-containing nitride is dissolved in said supercritical ammonia solvent in the form of gallium complex compounds containing alkali metals and NH₃ and/or its derivatives.

29. A process for preparing a bulk monocrystalline gallium-containing nitride in an autoclave according to claim 24, wherein said gallium complex compound in said supercritical ammonia solution is formed from a dissolution of GaN and/or dissolution of metallic Ga with supercritical ammonia solvent.

30. A process for controlling the recrystallization of a gallium-containing nitride in a supercritical ammonia solution which comprises the steps of (i) preparing a supercritical ammonia solution containing soluble gallium complex compounds formed by dissolving of gallium-containing nitride feedstock in the dissolution zone and (ii) controlling over-saturation of said supercritical ammonia solution with respect to the crystallization seed, while maintaining a temperature in the crystallization zone lower than that in the dissolution zone.

31. A process for controlling recrystallization of a gallium-containing nitride in a supercritical ammonia solution according to claim 30, in which over-saturation of said supercritical solution with respect to said crystallization seed is maintained below the level where the phenomenon of spontaneous nucleation of gallium-containing nitride appears.

32. A process for controlling recrystallization of a gallium-containing nitride in a supercritical ammonia solution according to claim 30, in which over-saturation of said supercritical ammonia solution with respect to said crystallization seed, is controlled by adjusting pressure and composition of the supercritical ammonia solvent.

33. A process for controlling recrystallization of a gallium-containing nitride in a supercritical ammonia solution according to claim 30, in which over-saturation of said supercritical ammonia solution is controlled by adjusting the crystallization temperature.

34. A process for controlling recrystallization of a gallium-containing nitride in a supercritical ammonia solution according to claim 30, in which over-saturation of said supercritical ammonia solution is controlled by adjusting the temperature difference between the dissolution zone and the crystallization zone.

35. A process for controlling recrystallization of a gallium-containing nitride in a supercritical ammonia solution according to claim 30, in which over-saturation of said supercritical ammonia solution is controlled by adjusting the rate of chemical transport.

36. A process for obtaining a gallium-containing nitride crystal, comprising the steps of:

(i) providing a gallium-containing feedstock, an alkali metal-containing component, at least one crystallization seed and a nitrogen-containing solvent in at least one container;

(ii) bringing the nitrogen-containing solvent into a supercritical state;

(iii) at least partially dissolving the gallium-containing feedstock at a first temperature and at a first pressure; and

(iv) crystallizing gallium-containing nitride on the crystallization seed at a second temperature and at a second pressure while the nitrogen-containing solvent is in the supercritical state;

wherein at least one of the following criteria is fulfilled;

(a) the second temperature is higher than the first temperature; and

(b) the second pressure is lower than the first pressure.

37. The process according to claim 36, wherein the at least one container is an autoclave.

38. The process according to claim 36, wherein the gallium-containing feedstock is at least partially dissolved before step (iv).

39. The process according to claim 36, wherein the gallium-containing feedstock is at least partially dissolved during step (iv).

40. The process according to claim 36, wherein the process is conducted in a container having a dissolution zone at the first temperature and a crystallization zone at the second temperature and wherein the second temperature is higher than the first temperature.

41. The process according to claim 40, wherein the difference in temperature between the dissolution zone and crystallization zone is selected so as to ensure convective transport in the supercritical solution.

42. The process according to claim 41, wherein the difference in temperature between the second temperature and the first temperature is at least 1°

C.

43. The process according to claim 42, wherein the difference in temperature between the second temperature and the first temperature is from about 5 to about 150°

C.

44. The process according to claim 36, wherein the gallium-containing nitride has the general formula Al_xGa_1-x-yIn_yN, where 0≦

x<

1, 0≦

y<

1, 0≦

x+y<

1.

45. The process according to claim 44, wherein the gallium-containing nitride has the general formula Al_xGa_1-x-yIn_yN, where 0≦

x<

0.5 and 0 y<

0.5.

46. The process according to claim 44, wherein the gallium-containing nitride is gallium nitride.

47. The process according to claim 36, wherein the gallium-containing feedstock comprises at least one compound selected from the group consisting of gallium nitride, gallium azides, gallium imides, gallium amido-imides, gallium hydrides, gallium-containing alloys, metallic gallium and mixtures thereof.

48. The process according to claim 47, wherein the gallium-containing feedstock comprises metallic gallium and gallium nitride.

49. The process according to claim 47, wherein the feedstock further comprises an aluminium feedstock, an indium feedstock or mixtures thereof, wherein the feedstocks are selected from the group consisting of nitrides, azides, imides, amido-imides, hydrides, alloys, metallic aluminium, and metallic indium.

50. The process according to claim 36, wherein the alkali metal-containing component is at least one metallic alkali metal or at least one alkali metal salt.

51. The process according to claim 50, wherein the alkali metal in the alkali metal-containing component is lithium, sodium, potassium or cesium.

52. The process according to claim 51, wherein the alkali metal in the alkali metal-containing component is sodium or potassium.

53. The process according to claim 50, wherein the alkali metal salt is an amide, an imide or an azide.

54. The process according to claim 36, wherein a surface of the at least one crystallization seed is a crystalline layer of a gallium-containing nitride.

55. The process according to claim 54, wherein the gallium-containing nitride of the crystalline layer has the general formula Al_xGa_1-x-yIn_yN, where 0≦

x<

1, 0≦

y<

1, 0≦

x+y<

1.

56. The process according to claim 54, wherein the crystalline layer has a dislocation density of less than 10⁶/cm².

57. The process according to claim 36, wherein the nitrogen-containing solvent is ammonia, a derivative thereof, or mixtures thereof.

58. The process according to claim 36, wherein the first temperature and the second temperature are from about 100°

C. to about 800°

C. and wherein the second temperature is at least 1°

C. higher than the first temperature.

59. The process according to claim 58, wherein the first temperature and the second temperature are from about 300°

C. to about 600°

C.

60. The process according to claim 59, wherein the first temperature and the second temperature are from about 300°

C. to about 550°

C.

61. The process according to claim 36, wherein the first pressure and the second pressure are the same and are from about 1000 bar (10⁵ kPa) to about 10 000 bar (10⁶ kPa).

62. The process according to claim 61, wherein the first pressure and the second pressure are the same and are from about 1000 bar (10⁵ kPa) to about 5500 bar (5.5×

10⁵ kPa).

63. The process according to claim 62, wherein the first pressure and the second pressure are the same and are from about 1500 bar (1.5×

10⁵ kPa) to about 3000 bar (3×

10⁵ kPa).

64. The process according to claim 36, wherein step (iv) is conducted so that the crystallization selectively takes place on the crystallization seed.

65. A process for preparing a gallium-containing nitride crystal comprising the steps of:

(i) providing a gallium-containing feedstock comprising at least two different components, an alkali metal-containing component, at least one crystallization seed and a nitrogen-containing solvent in a container having a dissolution zone and a crystallization zone, whereby the gallium-containing feedstock is provided in the dissolution zone and the at least one crystallization seed is provided in the crystallization zone;

(ii) subsequently bringing the nitrogen-containing solvent into a supercritical state;

(iii) subsequently partially dissolving the gallium-containing feedstock at a dissolution temperature and at a dissolution pressure in the dissolution zone, whereby a first component of the gallium-containing feedstock is substantially completely dissolved and a second component of the gallium-containing feedstock as well as the crystallization seed(s) remain substantially undissolved so that an undersaturated solution with respect to gallium-containing nitride is obtained;

(iv) subsequently setting the conditions in the crystallization zone at a second temperature and at a second pressure so that over-saturation with respect to gallium-containing nitride is obtained and crystallization of gallium-containing nitride occurs on the at least one crystallization seed and setting the conditions in the dissolution zone at a first temperature and at a first pressure so that the second component of the gallium-containing feedstock is dissolved;

wherein the second temperature is higher than the first temperature.

66. The process according to claim 65, wherein the first component of the gallium-containing feedstock is metallic gallium and the second component of the gallium-containing feedstock is gallium nitride.

67. The process according to claim 65, wherein the crystallization is conducted so that it selectively takes place on the crystallization seed.

68. The process according to claim 65, wherein the first temperature and the first pressure in the dissolution zone and the second temperature and the second pressure in the crystallization zone are selected so that the concentration of gallium in the over-saturated solution remains substantially the same during crystallization.

69. The process according to claim 65, wherein the container comprises at least one baffle between the dissolution zone and the crystallization zone.

70. The process according to claim 69, wherein the at least one baffle has a central opening, circumferential openings or a combination thereof.

71. A process for obtaining a gallium-containing nitride crystal, comprising the steps of:

(i) providing a gallium-containing feedstock, at least one crystallization seed and a nitrogen-containing solvent in at least one container;

(ii) bringing the nitrogen-containing solvent into a supercritical state;

(iii) at least partially dissolving the gallium-containing feedstock at a first temperature and at a first pressure; and

(iv) crystallizing gallium-containing nitride on the crystallization seed at a second temperature and at a second pressure while the nitrogen-containing solvent is in the supercritical state;

wherein at least one of the following criteria is fulfilled;

(a) the second temperature is higher than the first temperature; and

(b) the second pressure is lower than the first pressure.

72. The process according to claim 71, further comprising the step of making at least two zones of different temperatures in the autoclave.

73. The process according to claim 71, wherein said step of controlling the temperature difference includes a step of making convection in the autoclave for chemical transport in the supercritical solution.

74. The process according to claim 71, further comprising the step of providing the gallium-containing feedstock including at least one of a gallium-containing nitride and its precursors in the autoclave.