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Toroidal low-field reactive gas source

  • US 7,161,112 B2
  • Filed: 10/20/2003
  • Issued: 01/09/2007
  • Est. Priority Date: 06/26/1997
  • Status: Expired due to Fees
First Claim
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1. A toroidal plasma chamber for use with a reactive gas source comprising:

  • an inlet for receiving a gas;

    at least one plasma chamber wall for containing the gas, the plasma chamber wall comprising at least one of a metallic material or coated metallic material;

    at least one dielectric spacer that electrically isolates the plasma chamber into a plurality of portions to prevent induced current flow from forming in the plasma chamber itself, the dielectric spacer being protected from a plasma formed in the plasma chamber by at least one plasma chamber wall; and

    an outlet for outputting a reactive gas generated by the interaction of the plasma and the gas.

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