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Acoustic resonator performance enhancements using recessed region

  • US 7,161,448 B2
  • Filed: 06/14/2004
  • Issued: 01/09/2007
  • Est. Priority Date: 06/14/2004
  • Status: Active Grant
First Claim
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1. An acoustic resonator comprising:

  • a substrate having a first surface;

    a first electrode adjacent the first surface of the substrate;

    a layer of piezoelectric material adjacent the first electrode;

    a second electrode adjacent the layer of piezoelectric material, the second electrode having a second electrode outer perimeter that is shaped as a polygon; and

    a recessed region adjacent the second electrode, wherein the recessed region has a height relative to the second electrode, wherein the recessed region height defines a recessed region outer perimeter, and wherein the recessed region outer perimeter is recessed relative to the second electrode outer perimeter.

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