Digital micromirror device having a window transparent to ultraviolet (UV) light
First Claim
1. A window assembly for a digital micromirror device (DMD) having an array of individually addressable mirrors, comprising:
- a) a frame adapted in size to be coupled to the DMD and having an aperture at least the size of the mirror array, said frame about said aperture having a first chamfered edge;
b) a UV light transmissable window coupled within said aperture, said window including a periphery provided with a second chamfered edge, said first and second chamfered edges together defining a channel; and
c) a brazing material provided in said channel that provides a seal between said window to said frame.
1 Assignment
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Accused Products
Abstract
A UV-transmissable window assembly for a DMD device includes a UV-transmissable glass window provided in a frame. The window and frame are bonded together to preferably effect a hermetic seal therebetween. Optical coatings specific to the intended wavelength of light transmission are applied to the inner and outer surfaces of the glass window to reduce reflection and increase light transmission therethrough. The window assembly, and DMD provided with the same, is adapted for excellent transmission of ultraviolet light, even at the deep ultraviolet portion of the spectrum. The DMD window assembly has application in the medical arts, both surgery and device manufacture, in the production of integrated circuits (IC), and in other optical lithography applications, among other fields.
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Citations
51 Claims
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1. A window assembly for a digital micromirror device (DMD) having an array of individually addressable mirrors, comprising:
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a) a frame adapted in size to be coupled to the DMD and having an aperture at least the size of the mirror array, said frame about said aperture having a first chamfered edge; b) a UV light transmissable window coupled within said aperture, said window including a periphery provided with a second chamfered edge, said first and second chamfered edges together defining a channel; and c) a brazing material provided in said channel that provides a seal between said window to said frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A digital micromirror device (DMD), comprising:
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a) a base element provided with a two dimensional array of individually addressable mirrors; b) a frame coupled to the base element and having an aperture at least the size of the mirror array; and c) a window coupled within said aperture and bonded to said frame, said window comprising a material adapted to permit high transmission of UV wavelength light therethrough. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. A digital micromirror device (DMD), comprising:
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a) a base element provided with a two dimensional array of individually addressable mirrors; b) a frame coupled to the base element and having an aperture at least the size of the mirror array, said frame comprised of a material having a first coefficient of thermal expansion; c) a window coupled within said aperture of said frame, said window comprising a material adapted to permit high transmission of UV wavelength light therethrough and having a second coefficient of thermal expansion significantly different than said first coefficient of thermal expansion; and d) a seal between said window and said frame. - View Dependent Claims (38, 39)
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40. A digital micromirror device (DMD), comprising:
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a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors; b) a Kovar®
alloy frame having an aperture at least the size of the mirror array;c) an argon fluoride grade fused silica window between said frame and said base element; and d) a hermetic seal between said window and said base element.
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41. A digital micromirror device (DMD), comprising:
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a) a base element having a first side and a second side, said first side provided with a two dimensional array of individually addressable mirrors; b) a frame having an aperture at least the size of the mirror array; and c) a window between said frame and said base element, said window comprising a material adapted to permit at least 90% transmissibility of UV wavelengths at 185-nm and above, wherein said window and said base element are coupled in a manner which defines a hermetic seal about said array of mirrors.
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42. A method of assembling a window unit for a digital micromirror device (DMD), comprising:
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a) providing a frame having an aperture; b) providing a fused silica glass window; c) bonding said window in said aperture of said frame to form a window unit; and d) optimizing said window for transmission of light at one or more particular wavelengths. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51)
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Specification