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Methods and apparatuses for detecting classifying and measuring spot defects in an image of an object

  • US 7,162,073 B1
  • Filed: 11/30/2001
  • Issued: 01/09/2007
  • Est. Priority Date: 11/30/2001
  • Status: Expired due to Fees
First Claim
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1. A method for detecting spot defects in an image of an object, the method comprising:

  • acquiring an image of the object at only a single plane of focus;

    aligning an alignment model with at least one object region within the image so as to provide at least one aligned object region;

    estimating, using the image, a background image representing allowable and expected appearance within the at least one aligned object region, by using a median filter of a larger spatial scale to provide a mask for use with a median filter of a smaller spatial scale;

    removing the background image from the image within the at least one aligned object region so as to provide a foreground image having at least one foreground region;

    computing a threshold image for at least one of the foreground regions in the foreground image;

    applying the threshold image to the foreground image within at least one of the foreground regions so as to provide a defect image; and

    using connected component analysis to form candidate defects in the defect image.

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