System for evaluating probing networks

• US 7,164,279 B2
• Filed: 12/09/2005
• Issued: 01/16/2007
• Est. Priority Date: 04/14/1995
• Status: Expired due to Fees

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Gleason, K. Reed, Strid, Eric W., Schappacher, Jerry B., Carlton, Dale E.
• Primary Examiner(s): Nguyen; Vinh P.
• Application Number:
  US11/298,799
• Publication Number:
  US 20060103403A1
• Time in Patent Office: 403 Days
• Field of Search: 324/73.1, 324/158.1, 324754-762, 333246-248, 439/482, 439/824
• US Class Current: 324/750.22
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/073 Multiple probes
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area.

Claims

1. A method for evaluating signal conditions in a probe measurement network of the type having a plurality of separate measurement channels, each of said measurement channels communicating through a corresponding device-probing end included on a probe tip array, said method comprising:

(a) providing an interconnect assembly including a base having an upper face, a first conductive planar probing area on said upper face, and a reference junction, said reference junction being connected to said first conductive planar probing area by a high-frequency transmission structure including a transmission line;

(b) placing the respective device-probing end of a first of said measurement channels into contact with said first planar probing area, transmitting a high-frequency signal through said first one of said measurement channels, said transmission line, and said reference junction and, thereafter, measuring said signal;

(c) repeating step (b) for another of said plurality of measurement channels; and

(d) evaluating the relative signal conditions in different ones of said measurement channels by comparing the measured signals.

2. The method of claim 1 including connecting a reference sensing unit to said reference junction, transmitting each signal from a different sourcing unit within said probe measurement network and measuring each signal at said reference sensing unit.

3. The method of claim 2 including adjusting said measured signals until said measured signals are substantially identical.

4. The method of claim 2 including connecting a reference sourcing unit to said reference junction, transmitting each signal from said reference sourcing unit and measuring each signal at a different sensing unit within said probe measurement network.

5. The method of claim 4 further including adjusting each sensing unit until said measured signals are substantially identical.

6. The method of claim 1 including transmitting said signal through said first one of said measurement channels before transmitting said signal through said reference junction.

7. The method of claim 1 including calibrating said probe measurement network by adjusting said measured signals.

8. The method of claim 1 including calibrating said probe measurement network by computationally compensating for the differences between said measured signals.

9. The method of claim 1 including, in step (a), providing a second conductive planar probing area on said upper face in spaced-apart adjacent relationship to the first said conductive planar probing area, and further including, in step (b), simultaneously placing each of the device-probing ends that are out of contact with said first conductive planar probing area into contact with said second conductive planar probing area.

10. The method of claim 1 including the further steps of providing an X-Y-Z positioning mechanism, bringing said device-probing ends into contact with different devices at selected times by means of said X-Y-Z positioning mechanism and at different selected times also bringing selected ones of said device-probing ends into contact with said conductive planar probing area by using said X-Y-Z positioning mechanism.

11. The method of claim 10 including transmitting a second high-frequency signal through a second one of said measurement channels, said transmission line, and said reference junction.

12. A method for evaluating signal conditions in a probe measurement network of the type having a plurality of separate measurement channels, each of said measurement channels communicating through a corresponding device-probing end included on a probe tip array, said method comprising:

(a) providing an interconnect assembly including a base having an upper face, respective first, second, and third conductive planar probing areas on said upper face, and a reference junction, said reference junction being connected to said conductive planar probing areas by a high-frequency transmission structure including a transmission line;

(b) placing the respective device-probing ends of a first one and a second one of said measurement channels respectively into contact with said first and second planar probing areas, transmitting a respective high-frequency signal through each of said first and second ones of said measurement channels, said transmission line, and said reference junction, and thereafter measuring each of said respective signals;

(c) consecutively repeating step (b) for other ones of said plurality of measurement channels; and

(d) evaluating the relative signal conditions in different ones of said measurement channels by comparing the measured signals.

13. The method of claim 12 including the further step of providing a substantially constant high-frequency transmission characteristic in said transmission line.