Packaging for an interferometric modulator

• US 7,164,520 B2
• Filed: 05/12/2004
• Issued: 01/16/2007
• Est. Priority Date: 05/12/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Chui, Clarence, Cummings, William J., Kothari, Manish, Palmateer, Lauren Fay, Gally, Brian James
• Primary Examiner(s): Schwartz; Jordan
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US10/844,819
• Publication Number:
  US 20050254115A1
• Time in Patent Office: 979 Days
• Field of Search: 359/245
• US Class Current: 359/245
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate is provided and a desiccant is applied to the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package

Claims

1. A method of packaging interferometric modulator arrays into individual devices, comprising:

providing a transparent substrate;

manufacturing interferometric modulator arrays on a back side of the substrate;

providing a back plate;

providing a desiccant;

sealing the back plate to the backside of the substrate with a back seal, thereby forming multiple packages, wherein said desiccant is sealed inside said multiple packages;

hardening the back seal;

scribing the substrate between multiple packages; and

breaking the substrate into individual devices.

2. The method of claim 1, the method comprising

sealing in non-ambient conditions as a controlled environment of one of either inert gas or dry air.

3. The method of claim 1, the method further comprising:

applying an end seal to the individual devices.

4. The method of claim 1, wherein providing a back plate comprises providing a back plate having recessed regions.

5. The method of claim 4, wherein providing a back plate with recessed regions comprises forming ribs on the back plate.

6. The method of claim 5, wherein forming ribs on the back plate comprises patterning ribs onto the back plate.

7. The method claim 5, wherein forming ribs on the back plate comprises printing a material onto the back plate.

8. The method of claim 5, wherein forming ribs on the back plate comprises stenciling a material onto the back plate.

9. The method of claim 4, wherein providing a back plate having recessed regions comprises eroding the back plate in those regions to form cavities.

10. The method of claim 4, wherein providing a back plate having recessed regions comprises providing a back plate having molding regions.

11. The method of claim 4, wherein providing a back plate having recessed regions comprises mounting a frame on a flat back plate, wherein the frame defines cavities between struts of the frame and the transparent substrate.

13. The method of claim 1, wherein providing a transparent substrate comprises providing a transparent substrate with recessed regions in which interferometric modulators are formed.

14. The method of claim 1, wherein providing a back plate comprises providing a flexible, polymer sheet.

15. The method of claim 1, wherein providing a transparent substrate comprises providing a transparent substrate having integrated spacers.

16. The method of claim 1, wherein applying the desiccant comprises:

aligning the transparent substrate to the back plate;

joining the transparent substrate to the back plate; and

sealing the back plate to the transparent substrate.

17. The method of claim 1, wherein applying the desiccant comprises:

applying the desiccant through a hole; and

sealing the hole.

18. The method of claim 1, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate with a self-healing seal.

19. The method of claim 1, wherein sealing the back plate to the transparent substrate comprises sealing a hole in the back plate.

21. The method of claim 1, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having a vacuum.

22. The method of claim 21, the method further comprising maintaining the vacuum pressure in the package.

24. The method of claim 1, wherein sealing the back plate to the transparent substrate comprises sealing the back plate to the transparent substrate in an environment having a pressure of higher than vacuum up to and including ambient pressure to form the seal.

12. A method of packaging an interferometric modulator array, comprising:

providing a transparent substrate;

manufacturing interferometric modulator arrays on a back side of the substrate;

providing a back plate;

providing a desiccant; and

sealing the back plate to the backside of the substrate with a back seal, thereby forming a package, wherein said desiccant is sealed inside said package,

wherein providing a back plate further comprises providing a sheet of foil with integral spacer posts such that the spacer posts lie between multiple interferometric modulator arrays on the transparent substrate.

20. A method of packaging interferometric modulator array devices, comprising:

providing a transparent substrate;

manufacturing interferometric modulator arrays on a back side of the substrate;

providing a back plate;

providing a desiccant;

sealing the back plate to the backside of the substrate with a back seal, thereby forming multiple packages, wherein said desiccant is sealed inside said multiple packages;

scribing the substrate between multiple packages; and

breaking the substrate into individual devices,

wherein sealing the back plate to the transparent substrate comprises forming a seal line wide enough such that the seal is not broken when the substrate is scribed and broken.

23. A method of packaging an interferometric modulator, comprising:

providing a transparent substrate;

manufacturing an interferometric modulator on a back side of the substrate;

providing a back plate;

providing a desiccant; and

sealing the back plate to the backside of the substrate with a back seal, thereby forming a package, wherein said desiccant is sealed inside said package,

wherein sealing the back plate to the transparent substrate further comprises sealing the back plate to the transparent substrate in an environment having an initial vacuum, where environmental pressure increases from vacuum to a higher pressure as sealing occurs such that, as pressure in the package increases due to reduced volume, increased environmental pressure aids in creating a good seal.

25. The method of claim 23, wherein the method comprises maintaining the higher pressure up to and including ambient pressure in the package.

30. The method of claim 23, wherein the increased pressure inside the package during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the package is at the higher pressure.

26. A method of packaging an interferometric modulator, comprising:

providing a transparent substrate;

manufacturing an interferometric modulator on a back side of the substrate;

providing a back plate;

providing a desiccant; and

sealing the back plate to the backside of the substrate with a back seal, thereby forming a package, wherein said desiccant is sealed inside said package,

wherein sealing the back plate to the transparent substrate further comprises sealing the back plate to the transparent substrate in an environment having an initial pressure higher than vacuum up to an including ambient pressure, where environmental pressure then increases to a higher pressure than the initial pressure as sealing occurs such that, as pressure in the package increases due to reduced volume, increased environmental pressure aids in creating a good seal.

31. The method of claim 26, wherein the increased pressure inside the cavity during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the cavity is at the higher pressure.

27. A method of packaging an interferometric modulator, comprising:

providing a transparent substrate;

manufacturing an interferometric modulator on a back side of the substrate;

providing a back plate;

providing a desiccant; and

sealing the back plate to the backside of the substrate with a back seal, thereby forming a package, wherein said desiccant is sealed inside said package,

wherein sealing the back plate to the transparent substrate further comprises sealing the back plate to the transparent substrate in an environment having a pressure higher than ambient pressure to form the seal.

28. The method of claim 27, wherein the method comprises maintaining the higher pressure in the package.

29. A method of packaging an interferometric modulator, comprising:

providing a transparent substrate;

manufacturing an interferometric modulator on a back side of the substrate;

providing a back plate;

providing a desiccant; and

sealing the back plate to the backside of the substrate with a back seal, thereby forming a package, wherein said desiccant is sealed inside said package,

wherein sealing the back plate to the transparent substrate further comprises sealing the back plate to the transparent substrate in an environment having an initial environmental pressure higher than ambient pressure, wherein the environmental pressure then increases to a higher pressure than the initial pressure as sealing occurs such that, as pressure in the package increases due to reduced volume, increased environmental pressure aids in creating a good seal.

32. The method of claim 29, wherein the increased pressure inside the package during sealing creates a convex backplane shape by partial adhesive curing during a period of time in which the package is at the higher pressure.

33. A method of packaging interferometric modulator display devices, comprising:

providing a display panel comprising a transparent substrate, a plurality of interferometric modulator arrays formed on said transparent substrate, and a back plate sealed to said transparent substrate by a back seal to form multiple display panel packages;

hardening the back seal;

scribing the display panel between the multiple display panel packages; and

breaking the display panel into individual devices.

34. The method of claim 33, wherein said transparent substrate comprises glass.

35. The method of claim 33, further comprising applying an end seal to said individual devices.

36. The method of claim 33, wherein said backplate comprises glass.

37. The method of claim 36, wherein said transparent substrate comprises glass.

38. The method of claim 33, wherein scribing the display panel comprises scribing the transparent substrate.

39. The method of claim 33, wherein scribing the display panel comprises scribing the back plate.