Temperature compensated pressure sensor
First Claim
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1. A pressure sensor comprising:
- a sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side, the sensor membrane being at least partially formed from a conductive material;
a reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side, the reference membrane being at least partially formed from a conductive material;
associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;
wherein,the associated circuitry converts deflection of the reference to a temperature compensation value used to adjust the output signal to provide a temperature compensated output indicative of the pressure to be sensed.
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Abstract
A pressure sensor (30) for environments with wide ranging temperature variations such as vehicle tires. The sensor has a sensor membrane (53) exposed to the fluid pressure to be sensed, and a reference membrane subject to a predetermined pressure difference. Both membranes are conductive and connected to circuitry that converts the deflection in the sensor membrane into an output signal indicative of the pressure difference across the sensor membrane, and converts the deflection of the reference membrane into a temperature compensation value used to adjust the output signal into a temperature compensated signal indicate of the fluid pressure to be sensed.
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Citations
20 Claims
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1. A pressure sensor comprising:
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a sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side, the sensor membrane being at least partially formed from a conductive material; a reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side, the reference membrane being at least partially formed from a conductive material; associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;
wherein,the associated circuitry converts deflection of the reference to a temperature compensation value used to adjust the output signal to provide a temperature compensated output indicative of the pressure to be sensed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification