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Temperature compensated pressure sensor

  • US 7,165,460 B2
  • Filed: 07/03/2006
  • Issued: 01/23/2007
  • Est. Priority Date: 10/18/2004
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor comprising:

  • a sensor membrane exposed to fluid at a known pressure on one side, and exposed to fluid at a pressure to be sensed on its opposite side, the sensor membrane being at least partially formed from a conductive material;

    a reference membrane exposed to a first reference pressure on one side, and exposed to a second reference pressure on its opposite side, the reference membrane being at least partially formed from a conductive material;

    associated circuitry connected to both the sensor membrane and the reference membrane for converting deflection of the sensor membrane into an output signal indicative of a pressure difference between the known pressure and the fluid pressure to be sensed;

    wherein,the associated circuitry converts deflection of the reference to a temperature compensation value used to adjust the output signal to provide a temperature compensated output indicative of the pressure to be sensed.

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