Method and apparatus for an improved baffle plate in a plasma processing system

• US 7,166,166 B2
• Filed: 09/30/2002
• Issued: 01/23/2007
• Est. Priority Date: 09/30/2002
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Nakayama, Hiroyuki, Mitsuhashi, Kouji, Takase, Taira, Saigusa, Hidehito
• Primary Examiner(s): Kackar; Ram N.
• Application Number:
  US10/259,380
• Publication Number:
  US 20040063333A1
• Time in Patent Office: 1,576 Days
• Field of Search: 118/715, 118/725, 118/728, 156/345.51, 156/345.52, 156/345.53
• US Class Current: 118/715
• CPC Class Codes: H01J 37/32431 Constructional details of the reactor

Abstract

The present invention presents an improved baffle plate for a plasma processing system, wherein the design and fabrication of the baffle plate advantageously provides for a uniform processing plasma in the process space with substantially minimal erosion of the baffle plate.

Claims

1. A baffle plate for a plasma processing system, comprising:

a canted ring comprising an upper surface and a lower surface, said canted ring further including a first section and a second section, wherein said second section extends at an angle with respect to said first section such that said second section is inclined with respect to said first section, and wherein said canted ring includes an outer radial edge associated with said first section and an inner radial edge associated with said second section, said inner radial edge including an inner edge surface;

wherein said second section comprises at least one passageway extending through said second section from said upper surface to said lower surface and configured to permit the flow of a gas there through, each of said at least one passageway comprising an internal passageway surface, and

wherein said first section comprises;

a first mating surface on the upper surface of the canted ring proximate said outer radial edge and configured to mate with the plasma processing system, and

a second mating surface on the lower surface of the canted ring proximate said outer radial edge and configured to mate with the plasma processing system, and wherein;

an upper surface in said first section of said canted ring includes a recess outside an area of the first mating surface which extends partially but not completely through a thickness of said first section,

a lower surface in said first section of said canted ring includes another recess outside an area of the second mating surface which extends partially but not completely through a thickness of said first section, and a protrusion positioned adjacent to and radially inward of said another recess and extending from said lower surface in the first section; and

a protective barrier provided on a plurality of exposed surfaces of said baffle plate, wherein said exposed surfaces comprise said upper surface including a portion of said recess but excluding said first mating surface, said lower surface including said protrusion and a portion of said another recess but excluding said second mating surface, said inner edge surface of said inner radial edge, and said internal passageway surface of each of said at least one passageway.

2. The baffle plate as recited in claim 1, wherein said at least one passageway comprises a slot.

3. The baffle plate as recited in claim 2, wherein said slot comprises an entrance area and an exit area, wherein said entrance area is larger than said exit area.

4. The baffle plate as recited in claim 1, wherein at least one passageway comprises an orifice.

5. The baffle plate as recited in claim 1, wherein said canted ring further comprises a plurality of fastening receptors extending through said first section from said upper surface to said lower surface and configured to receive fastening devices in order to couple said baffle plate to said plasma processing system.

6. The baffle plate as recited in claim 5, wherein each of said plurality of fastening receptors comprises an entrant cavity, an exit through-hole, and an inner receptor surface.

7. The baffle plate as recited in claim 1, wherein said baffle plate comprises a metal.

8. The baffle plate as recited in claim 1, wherein said metal comprises aluminum.

9. The baffle plate as recited in claim 1, wherein said protective barrier comprises a compound containing at least one of a group III- element and a Lanthanon element.

10. The baffle plate as recited in claim 9, wherein said group III element comprises at least one of Yttrium, Scandium, and Lanthanum.

11. The baffle plate as recited in claim 9, wherein said Lanthanon element comprises at least one of Cerium, Dysprosium, and Europium.

12. The baffle plate as recited in claim 1, wherein said protective barrier comprises at least one of Yttria (Y₂O₃), Sc₂O₃, Sc₂F₃, YF₃, La₂O₃, CeO₂, Eu₂O₃, and DyO₃.

13. The baffle plate as recited in claim 12, wherein said coating consists essentially of Yttria.

14. The baffle plate as recited in claim 1, wherein said protective barrier comprises a minimum thickness and said minimum thickness is constant across at least one of said exposed surfaces.

15. The baffle plate as recited in claim 1, wherein said protective barrier comprises a minimum thickness and said minimum thickness is variable across at least one of said exposed surfaces.

16. The baffle plate as recited in claim 1, wherein said second section is inclined at an angle ranging from 0 to 45 degrees with respect to said first section.

17. The baffle plate as recited in claim 1, wherein said second section is inclined at an angle ranging from 0 to 60 degrees with respect to said first section.

18. The baffle plate as recited in claim 1, wherein said recess of the upper surface is positioned at a radially inner portion of said first section.

19. The baffle plate as recited in claim 1, wherein said protrusion is substantially rectangular in shape and has rounded edges.

20. The baffle plate as recited in claim 1, wherein said first section comprises a fastening receptor extending therethrough, wherein said fastening receptor comprises:

an entrant cavity having an opening on said upper surface; and

an exit through hole coupled to said entrant cavity and having an opening on said lower surface.

21. The baffle plate as recited in claim 20, wherein said recess of the upper surface is positioned radially between said fastening receptor and said second section.

22. The baffle plate as recited in claim 1 wherein said first section comprises:

a first substantially planar upper surface; and

a second substantially planar lower surface which is substantially parallel to said first substantially planar upper surface, wherein said recess of the upper surface is recessed from said first substantially planar upper surface.

23. The baffle plate as recited in claim 22, wherein said protective barrier is provided on only a portion of said recess of the upper surface.

24. The baffle plate as recited in claim 22, wherein the recess of the upper surface includes first and second sidewalls coupling said first substantially planar upper surface to a bottom surface of said recess.

25. The baffle plate as recited in claim 24, wherein said protective barrier is provided on at least one of said first and second sidewalls.

26. The baffle plate as recited in claim 22, wherein said another recess is recessed from said second substantially planar lower surface.

27. The baffle plate as recited in claim 26, wherein said protrusion extends from said second substantially planar lower surface.

28. The baffle plate as recited in claim 27, wherein said protrusion is positioned radially between said another recess and said second section.

29. The baffle plate as recited in claim 1, further comprising at least one uncoated surface not having said protective barrier thereon.

30. The baffle plate as recited in claim 29, wherein said at least one uncoated surface includes an anodized surface.

31. The baffle plate as recited in claim 29, wherein said at least one uncoated surface comprises a bare surface not having said protective barrier and not having an anodized layer thereon.

32. The baffle plate as recited in claim 29, wherein said a least one uncoated surface comprises:

a bare surface not having said protective barrier or an anodized layer thereon; and

an anodized surface.

33. The baffle plate as recited in claim 32, wherein said bare surface comprises said first and second mating surfaces.

34. The baffle plate as recited in claim 1, wherein said at least one passageway comprises a plurality of passageways.