Photogate for use in an imaging device

• US 7,166,879 B2
• Filed: 04/08/2002
• Issued: 01/23/2007
• Est. Priority Date: 06/18/1999
• Status: Expired due to Term

• Current Assignee: Aptina Imaging Corporation (ON Semiconductor Corporation)
• Original Assignee: Micron Technology, Inc.
• Inventors: Rhodes, Howard E.
• Primary Examiner(s): Munson; Gene M.
• Application Number:
  US10/117,281
• Publication Number:
  US 20020109157A1
• Time in Patent Office: 1,751 Days
• Field of Search: 257/249, 257/291, 257/292, 257/335, 257/375
• US Class Current: 257/291
• CPC Class Codes: H01L 27/14601 Structural or functional details thereof
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/1462 Coatings
• CPC Class Codes: H01L 27/1463 Pixel isolation structures
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 27/14689 MOS based technologies

Abstract

A photogate-based photosensor for use in a CMOS imager exhibiting improved short wavelength light response. The photogate is formed of a thin conductive layer about 50 to 3000 Angstroms thick. The conductive layer may be a silicon layer, a layer of indium and/or tin oxide, or may be a stack having an indium and/or tin oxide layer over a silicon layer. The thin conductive layer of the photogate permits a greater amount of short wavelength light to pass through the photogate to reach the photosite in the substrate, and thereby increases the quantum efficiency of the photosensor for short wavelengths of light.

Claims

1. A photogate for use in an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a transparent gate comprising a doped silicon layer transparent to radiant energy having a thickness within the range of 50 to 1500 Angstroms;

a conductive layer comprising indium tin oxide formed on said doped silicon layer; and

a gate oxide layer formed between the doped region and the transparent gate, said transparent gate formed on at least a portion of the gate oxide layer.

2. A photogate for use in an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a transparent gate comprising a doped silicon layer transparent to radiant energy having a thickness within the range of 50 to 1500 Angstroms;

a conductive layer comprising indium oxide formed on said doped silicon layer; and

a gate oxide layer formed between the doped region and the transparent gate, said transparent gate formed on at least a portion of the gate oxide layer.

3. A photogate for use in an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a transparent gate comprising a doped silicon layer transparent to radiant energy having a thickness within the range of 50 to 1500 Angstroms;

a conductive layer comprising tin oxide formed on said doped silicon layer; and

a gate oxide layer formed between the doped region and the transparent gate, said transparent gate formed on at least a portion of the gate oxide layer.

4. A photogate for use with an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a gate oxide layer formed above said doped region;

a doped silicon layer formed over at least a portion of said gate oxide layer, wherein said doped silicon layer has a thickness within the range of 50 to 1500 Angstroms; and

a conductive layer comprising a conductive material transparent to radiant energy formed on the doped silicon layer, wherein said conductive layer is indium tin oxide.

5. A photogate for use with an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a gate oxide layer formed above said doped region;

a doped silicon layer formed over at least a portion of said gate oxide layer, wherein said doped silicon layer has a thickness within the range of 50 to 1500 Angstroms; and

a conductive layer comprising a conductive material transparent to radiant energy formed on the doped silicon layer, wherein said conductive layer is indium oxide.

6. A photogate for use with an imaging device, said photogate comprising:

a doped layer formed in a substrate;

a doped region formed in said doped layer;

a gate oxide layer formed above said doped region;

a doped silicon layer formed over at least a portion of said gate oxide layer, wherein said doped silicon layer has a thickness within the range of 50 to 1500 Angstroms; and

a conductive layer comprising a conductive material transparent to radiant energy formed on the doped silicon layer, wherein said conductive layer is tin oxide.