Inline connection setting method and device and substrate processing devices and substrate processing system

• US 7,167,769 B2
• Filed: 03/01/2004
• Issued: 01/23/2007
• Est. Priority Date: 03/04/2003
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Wada, Shigeki
• Primary Examiner(s): Von Buhr; Maria N.
• Application Number:
  US10/546,385
• Publication Number:
  US 20060079985A1
• Time in Patent Office: 1,058 Days
• Field of Search: 700/8, 700117-121, 709220-222, 719321-327
• US Class Current: 700/121
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

It at least includes a step at which a coating and developing apparatus requests an exposure apparatus, connected inline thereto, to transfer profile information which is information relating to the exposure apparatus, a step at which the coating and developing apparatus receives the profile information from the exposure apparatus, and a step at which the coating and developing apparatus selects a software file to be used in the coating and developing apparatus, in association with the profile information.

Claims

1. An inline connection setting method for automatically setting connection between apparatuses which perform an inline process on an object to be processed, comprising steps of:

causing a first processing apparatus to request a second processing apparatus, connected inline to said first processing apparatus, to transfer profile information which is information relating to said second processing apparatus;

causing said first processing apparatus to receive said profile information from said second processing apparatus; and

causing said first processing apparatus to select a software file to be used in said first processing apparatus, in association with said profile information.

2. The inline connection setting method according to claim 1, wherein said first processing apparatus receives said profile information by directly communicating with said second processing apparatus via a communication path formed in an LAN.

3. The inline connection setting method according to claim 1, wherein said profile information includes at least maker information and model information of said second processing apparatus, and version information of software file to be used in said first processing apparatus.

4. The inline connection setting method according to claim 1, wherein said profile information includes information on whether said second processing apparatus is in a normal state or not.

5. The inline connection setting method according to claim 1, wherein said first processing apparatus is connected to said second processing apparatus in a 1-to-1 manner by a communication cable, and comprises plural types of hardware definition files which are information on assignment of connector pins of said communication cable, and

selects a hardware definition file to be used in said first processing apparatus from said plural types of hardware definition files in association with said profile information.

6. The inline connection setting method according to claim 5, wherein said first processing apparatus further comprising software for processing the object to be processed, and plural types of interface files, and

selects an interface file to be used in said first processing apparatus from said plural types of interface files in association with said selected hardware definition file.

7. The inline connection setting method according to claim 1, wherein said first processing apparatus requests said second processing apparatus to transfer said profile information every given time.

8. An inline connection setting apparatus for automatically setting connection of a second processing apparatus to a first processing apparatus which performs an inline process on an object to be processed, comprising:

first memory means having a connection-state checking section which checks connection for information communication with said second processing apparatus, connected inline to said first processing apparatus, an information acquisition section which requests said second processing apparatus to transfer profile information relating to said second processing apparatus and receives said profile information, and a file selecting section which selects a software file to be used in association with said profile information; and

control means for executing a program stored in said first memory means.

9. The inline connection setting apparatus according to claim 8, wherein said first processing apparatus is connected to said second processing apparatus, connected inline thereto, in a 1-to-1 manner by a communication cable, and

said first memory means stores plural types of hardware definition files which are information on assignment of connector pins of said communication cable.

10. The inline connection setting apparatus according to claim 9, wherein said file selecting section has a hardware-definition-file selecting section, and

said hardware-definition-file selecting section selects a hardware definition file to be used from said plural types of hardware definition files.

11. The inline connection setting apparatus according to claim 8, wherein said first memory means stores software for processing the object to be processed, said plural types of hardware definition files, and plural types of interface files.

12. The inline connection setting apparatus according to claim 11, wherein said file selecting section has a hardware-definition-file selecting section and an interface-file selecting section,

said hardware-definition-file selecting section selects a hardware definition file to be used from said plural types of hardware definition files, and

said interface-file selecting section selects an interface file to be used from said plural types of interface files.

13. The inline connection setting apparatus according to claim 8, wherein said information acquisition section receives said profile information by directly communicating with said inline-connected second processing apparatus via a communication path formed in an LAN.

14. The inline connection setting apparatus according to claim 8, wherein said profile information includes at least maker information and model information of said second processing apparatus, and version information of software file to be used in said first processing apparatus, and

said inline connection setting apparatus further comprises second memory means for storing said profile information received.

15. The inline connection setting apparatus according to claim 8, wherein said profile information includes information on whether said second processing apparatus is in a normal state or not.

16. The inline connection setting apparatus according to claim 8, wherein said first processing apparatus is a resist coating and developing apparatus, and said second processing apparatus is an exposure apparatus.

17. A substrate processing apparatus which performs an inline process on a substrate in cooperation with a partner apparatus, comprising:

a processing section which performs an inline process on the substrate;

a substrate transfer mechanism which transfers the substrate between said processing section and said partner apparatus;

a first communication interface which performs information communication with the partner apparatus for performing said inline process on the substrate;

a second communication interface which communicates software information with the partner apparatus;

information acquisition means which acquires profile information relating said partner apparatus from the partner apparatus via the second communication interface;

software-file memory means which stores a plurality of software files for controlling an operation of said substrate said substrate processing apparatus; and

file selecting means which selects, from said software-file memory means, a software file for controlling the operation of the said substrate processing.

18. The substrate processing apparatus according to claim 17, wherein said second communication interface is connected by an LAN to an interface corresponding to said partner apparatus.

19. The substrate processing apparatus according to claim 17, wherein said profile information includes at least maker information and model information of said partner substrate processing apparatus, and version information of software file to be used in said partner substrate processing apparatus.

20. The substrate processing apparatus according to claim 17, wherein said profile information includes information on whether said partner substrate processing apparatus is in a normal state or not.

21. The substrate processing apparatus according to claim 17, wherein said first communication interface is connected to an associated interface of said partner apparatus in a 1-to-1 manner by a communication cable, and said software-file memory means has plural types of hardware definition files which are information on assignment of connector pins of said communication cable, and

said file selecting means selects a hardware definition file to be used in said first processing apparatus from said plural types of hardware definition files in association with said profile information.

22. The substrate processing apparatus according to claim 21, wherein said software-file memory means further has software for processing the substrate, and plural types of interface files, and

said file selecting means selects an interface file to be used in the substrate processing apparatus from said plural types of interface files in association with said selected hardware definition file.

23. The substrate processing apparatus according to claim 17, wherein said information acquisition means requests said partner substrate processing apparatus to transfer said profile information every given time.

24. The substrate processing apparatus according to claim 17, wherein the substrate processing apparatus is a resist coating and developing apparatus, and said partner apparatus is an exposure apparatus.

25. A substrate processing system comprising a first processing apparatus which performs an inline process on an object to be processed, and a second processing apparatus, wherein

said first processing apparatus comprising a connection setting section having:

first memory means having a connection-state checking section which checks connection for information communication with said second processing apparatus, connected inline, an information acquisition section which requests said second processing apparatus to transfer profile information relating to said second processing apparatus and receives said profile information, and a file selecting section which selects a software file to be used in association with said profile information; and

control means for executing a program stored in said first memory means.

26. The substrate processing system according to claim 25, wherein said first processing apparatus is connected to said second processing apparatus, connected inline thereto, in a 1-to-1 manner by a communication cable, and

said first memory means stores plural types of hardware definition files which are information on assignment of connector pins of said communication cable.

27. The substrate processing system according to claim 26, wherein said file selecting section has a hardware-definition-file selecting section, and

said hardware-definition-file selecting section selects a hardware definition file to be used from said plural types of hardware definition files.

28. The substrate processing system according to claim 25, wherein said first memory means stores software for processing the object to be processed, said plural types of hardware definition files, and plural types of interface files.

29. The substrate processing system according to claim 28, wherein said file selecting section has a hardware-definition-file selecting section and an interface-file selecting section,

said hardware-definition-file selecting section selects a hardware definition file to be used from said plural types of hardware definition files, and

said interface-file selecting section selects an interface file to be used from said plural types of interface files.

30. The substrate processing system according to claim 25, wherein said information acquisition section receives said profile information by directly communicating with said inline-connected second processing apparatus via a communication path formed in an LAN.

31. The substrate processing system according to claim 25, wherein said profile information includes at least maker information and model information of said second processing apparatus, and version information of software file to be used in said first processing apparatus, and

said connection setting section comprises second memory means for storing said profile information received.

32. The substrate processing system according to claim 25, wherein said profile information includes information on whether said second processing apparatus is in a normal state or not.

33. The substrate processing system according to claim 25, wherein said first processing apparatus is a resist coating and developing apparatus, and said second processing apparatus is an exposure apparatus.