Method and unit for sensing physical quantity using capacitive sensor

• US 7,168,320 B2
• Filed: 07/22/2004
• Issued: 01/30/2007
• Est. Priority Date: 07/25/2003
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Kawai, Takaaki, Murata, Minoru
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): Hanley; John C.
• Application Number:
  US10/895,978
• Publication Number:
  US 20050016273A1
• Time in Patent Office: 922 Days
• Field of Search: None
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means

Abstract

A physical quantity (e.g., acceleration) sensing unit is provided. In this unit, a capacitive sensor has first and second fixed electrodes and a physical-quantity-sensitive movable electrode disposed between the first and second fixed electrodes. An adjusting circuit first adjusts a first bias voltage applied between the first fixed electrode and the movable electrode and a second voltage applied between the movable electrode and the second fixed electrode so that the movable electrode is brought into contact with either the first or second fixed electrode. The adjusting circuit then adjusts the first and second bias voltages to return the movable electrode to its original position. A detecting circuit detects an output on a capacitance relationship among the first and second fixed electrodes and the movable electrode. The output is subjected to determination of whether or not the output is out of order, when tested.

Claims

1. A method of sensing physical quantity using a capacitive sensor equipped with a first fixed electrode and a second fixed electrode disposed face to face and a movable electrode disposed between the first and second fixed electrodes so as to form variable first and second capacitors whose capacitances vary in response to the physical quantity sensed by the movable electrode, comprising:

first adjusting a first bias voltage applied between the first fixed electrode and the movable electrode and a second voltage applied between the movable electrode and the second fixed electrode respectively to allow the movable electrode to be brought into contact with either of the first and second fixed electrodes;

second adjusting the first and second bias voltages to allow the movable electrode to return to a non-contact original position thereof between the first and second fixed electrodes, the second bias voltage adjustment performed by the second adjusting means following the first bias voltage adjustment performed by the first adjusting means; and

detecting, for self-diagnosis of the unit, an output signal corresponding to a relationship of capacitances between the first and second capacitors.

2. The method according to claim 1, wherein the first adjusting step applies (i) a potential of higher than Vcc between the first fixed electrode and the movable electrode so that the first bias voltage becomes zero, and (ii) a potential of zero to the second fixed electrode so that the second bias voltage becomes a voltage of Vcc, the Vcc being a power supply voltage to the capacitive sensor.

3. The method according to claim 2, wherein the potential of higher than the voltage of Vcc is a potential predetermined so as to allow the movable electrode to be brought into contact with the first fixed electrode.

4. The method according to claim 1, wherein the first adjusting step applies (i) a potential of higher than Vcc between the second fixed electrode and the movable electrode so that the second bias voltage becomes zero, and (ii) a potential of zero to the first fixed electrode so that the first bias voltage becomes a voltage of Vcc, the Vcc being a power supply voltage to the capacitive sensor.

5. The method according to claim 4, wherein the potential of higher than the voltage of Vcc is a potential predetermined to allow the movable electrode to be brought into contact with the second fixed electrode.

6. The method according to claim 1, further comprising a step of determining, as the self-diagnosis of the unit, whether or not the output signal is out of order.

7. The method according to claim 6, wherein the determination step determines whether or not the output signal is fixedly biased toward a level higher or lower than a predetermined normal level detected when the movable electrode is at an intermediate position between the first and second fixed electrodes, the intermediate position being the non-contact original position.

8. A unit for sensing physical quantity comprising:

a capacitive sensor equipped with a first fixed electrode and a second fixed electrode disposed face to face and a movable electrode disposed between the first and second fixed electrodes so as to form variable first and second capacitors whose capacitances vary in response to a physical quantity sensed by the movable electrode;

an adjusting circuit adjusting, in a first step, a first bias voltage applied between the first fixed electrode and the movable electrode and a second bias voltage applied between the movable electrode and the second fixed electrode respectively to allow the movable electrode to be brought into contact with either of the first and second fixed electrodes, and adjusting, in a second step, the first and second bias voltages to allow the movable electrode to return to non-contact original position thereof between the first and second fixed electrodes, the second step following the first step; and

a detecting circuit detecting, for self-diagnosis of the unit, an output signal corresponding to a relationship of capacitances between the first and second capacitors.

9. The unit according to claim 8, wherein, in the first step, the adjusting circuit is configured to apply (i) a potential of higher than Vcc between the first fixed electrode and the movable electrode so that the first bias voltage becomes zero, and (ii) a potential of zero to the second fixed electrode so that the second bias voltage becomes a voltage of Vcc, the Vcc being a power supply voltage to be applied to the unit.

10. The unit according to claim 9, wherein the potential of higher than the voltage of Vcc is a potential predetermined as to allow the movable electrode to be brought into contact with the first fixed electrode.

11. The unit according to claim 8, wherein, in the first step, the adjusting circuit is configured to apply (i) a potential of higher than Vcc between the second fixed electrode and the movable electrode so that the second bias voltage becomes zero, and (ii) a potential of zero to the first fixed electrode so that the first bias voltage becomes a voltage of Vcc, the Vcc being a power supply voltage to be applied to the unit.

12. The unit according to claim 11, wherein the potential of higher than Vcc is a potential predetermined so as to allow the movable electrode to be brought into contact with the second fixed electrode.

13. The unit according to claim 8, further comprising a determination circuit configured to determine, as the self-diagnosis of the unit, whether or not the output signal is out of order.

14. The unit according to claim 13, wherein the determination circuit is configured to examine the output signal for being fixedly biased toward a level higher or lower than a pre-determined normal level detected when the movable electrode is at an intermediate position between the first and second fixed electrodes, the intermediate position being the non-contact original position.

15. The unit according to claim 8, further comprising a measuring circuit for measuring the physical quantity, wherein the measuring circuit is provided with a first circuit applying between the first and second fixed electrodes a voltage signal whose frequency is higher than a resonance frequency of the movable electrode and whose polarities are inverted at intervals between zero and Vcc and a second circuit applying to the movable electrode a voltage of Vcc/2, the Vcc being a power supply voltage to be applied to the unit.

16. The unit according to claim 8, wherein the unit is configured to detect, as the physical quantity, applied to the unit.

17. A unit for sensing physical quantity comprising:

a capacitive sensor equipped with a first fixed electrode and a second fixed electrode disposed face to face and a movable electrode disposed between the first and second fixed electrodes so as to form variable first and second capacitors whose capacitances vary in response to a physical quantity sensed by the movable electrode;

first adjusting means for adjusting a first bias voltage applied between the first fixed electrode and the movable electrode and a second bias voltage applied between the movable electrode and the second fixed electrode respectively to allow the movable electrode to be brought into contact with either of the first and second fixed electrodes;

second adjusting means for adjusting the first and second bias voltages to allow the movable electrode to return to non-contact original position thereof between the first and second fixed electrodes, the second bias voltage adjustment performed by the second adjusting means following the first bias voltage adjustment performed by the first adjusting means; and

means for detecting, for self-diagnosis of the unit, an output signal corresponding to a relationship of capacitances between the first and second capacitors.

18. An on-vehicle airbag system comprising:

an airbag unit mounted on a vehicle and formed to have an airbag;

a physical quantity sensing unit sensing a physical quantity as a signal indicative of the sensed physical quantity; and

a controller controlling a development of the airbag in response to the signal outputted by the sensing unit,

wherein the physical quantity sensing unit comprises;

a capacitive sensor equipped with a first fixed electrode and a second fixed electrode disposed face to face and a movable electrode disposed between the first and second fixed electrodes so as to form variable first and second capacitors whose capacitances vary in response to a physical quantity sensed by the movable electrode;

an adjusting circuit adjusting, in a first step, a first bias voltage applied between the first fixed electrode and the movable electrode and a second bias voltage applied between the movable electrode and the second fixed electrode respectively to allow the movable electrode to be brought into contact with either of the first and second fixed electrodes, and adjusting, in a second step, the first and second bias voltages to allow the movable electrode to return to a non-contact original position thereof between the first and second fixed electrodes, the second step following the first step;

a detecting circuit detecting, for self-diagnosis of the unit, an output signal corresponding to a relationship of capacitances between the first and second capacitors; and

a determining unit determining whether or not the output signal detected by the detecting circuit is out of order, as the self-diagnosis of the unit.