Media isolated electrostatically actuated valve

• US 7,168,675 B2
• Filed: 12/21/2004
• Issued: 01/30/2007
• Est. Priority Date: 12/21/2004
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Wang, Tzu-Yu, Cabuz, Cleopatra, Cabuz, Eugen I.
• Primary Examiner(s): Bastianelli; John
• Application Number:
  US11/018,799
• Publication Number:
  US 20060131529A1
• Time in Patent Office: 770 Days
• Field of Search: 251/4, 251/7, 251/129.01, 251/129.06, 251/331, 251/335.2
• US Class Current: 251/7
• CPC Class Codes: F16K 31/02 electric F16K31/004 takes precedence; magnetic

Abstract

A valve structure having a top part, a flexible media conveyance, such as a tube, a diaphragm and a bottom part with a support for the tube. The top surface of the diaphragm and the bottom surface of the top part may have electrodes attached. When there is no electric potential applied across the electrodes, the diaphragm may rest on and close the passageway in the flexible tube for effectively preventing a fluid flow. When an electrical potential is applied to the electrodes, the diaphragm may be pulled up off from the tube thereby opening or partially opening the passageway in the tube for a media flow or pressure transfer. Partial opening may be for modulation purposes. There may be a tension mechanism attached to the diaphragm. A controller may apply an electrical potential to the electrodes for at least partially opening or closing the valve.

Claims

1. An electrostatic valve comprising:

a bottom structure;

a top structure situated on the bottom structure;

a diaphragm situated between the bottom structure and the top structure;

a squeezable conveyance structure situated between the bottom structure and the diaphragm;

a first electrical conductor attached to the diaphragm; and

a second electrical conductor attached to the top structure.

2. The valve of claim 1, wherein the diaphragm has a plurality of states ranging from closing to opening the conveyance structure.

3. The valve of claim 2, wherein:

a sufficient electrical potential across the first and second conductors results in the diaphragm being in one of the states; and

a lack of sufficient electrical potential across the first and second conductors results in the diaphragm being in another state.

4. The valve of claim 3, wherein some of the plurality of states are modulating states.

5. The valve of claim 3, wherein the bottom structure, the top structure, the diaphragm, and/or the conveyance structure is fabricated with polymer technology.

6. The valve of claim 5, wherein the conveyance structure is a flexible tube.

7. The valve of claim 6, wherein the flexible tube has ports which are accessible externally of the valve.

8. The valve of claim 7, wherein:

the first conductor is a layer of metal on the diaphragm; and

the second conductor is a layer of metal on an inside surface of the top structure.

9. The valve of claim 8, wherein a dielectric coating is on at least one of the first and second conductors.

10. The valve of claim 9, wherein the bottom structure and the top structure are plastic parts.

11. The valve of claim 10, wherein a controller is connected to the first and second conductors.

12. The valve of claim 3, further comprising a tension mechanism attached to the diaphragm.

13. A valve structure comprising:

a base;

a perimeter layer situated on the base;

a diaphragm situated on the perimeter layer;

a chamber structure situated on a perimeter of the diaphragm;

a first electrode attached to the chamber structure;

a second electrode attached to the diaphragm; and

a tube situated between the base and the diaphragm.

14. The structure of claim 13, wherein:

the diaphragm has a first position and a second position;

the diaphragm closes off the tube in the first position; and

the diaphragm at least partially opens up the tube in the second position.

15. The structure of claim 14, wherein:

applying a voltage across the first and second electrodes causes the diaphragm to move to the second position; and

removing the voltage from across the first and second electrodes causes the diaphragm to move to the first position.

16. The structure of claim 15, further comprising:

an obstruction situated on the base proximate to the tube; and

wherein the diaphragm in the first position closes the tube with a force that pushes the tube against the obstruction due to a pre-induced stress as the clamped edge of the diaphragm between the perimeter layer and the chamber structure, overlaps the distance of the obstruction from the base.

17. The structure of claim 16, further comprising a tension mechanism connected to the diaphragm.

18. The structure of claim 16, wherein the chamber structure has an orifice.

19. The structure of claim 18, wherein the tube connects a first port at an outer edge of the perimeter layer with a second port at the outer edge of the perimeter layer.

20. The structure of claim 19, wherein:

the first electrode is a first conductive coating on an inside surface of the chamber structure; and

the second electrode is a second conductive coating on the diaphragm.

21. The structure of claim 20, further comprising a dielectric layer formed on at least one of the first and second conductive coatings.

22. The structure of claim 21, wherein the base, the chamber structure, the perimeter structure, and/or the diaphragm is fabricated with polymer technology.

23. The structure of claim 15, further comprising a controller connected to the electrodes.

24. A fluid control device comprising:

a first part having a base, a perimeter wall having a first port and a second port, and a support structure situated on the base;

a tube at least partially situated on the support structure, and having a first end connected to the first port and a second end connected to the second port;

a diaphragm situated on the perimeter wall and covering an area within the perimeter wall;

a second part situated on the diaphragm in a vicinity of the perimeter wall and having a cavity in an area within the perimeter wall;

a first electrode attached to the diaphragm; and

a second electrode attached to an inside surface of the cavity.

25. The device of claim 24, wherein:

the diaphragm constricting the tube at least partially is a first position of the diaphragm; and

the diaphragm not constricting the tube is a second position of the diaphragm.

26. The device of claim 25, wherein:

an application of an electrical potential across the first and second electrodes causes the diaphragm to be in a second position; and

a partial or no application of the electrical potential across the first and second electrodes causes the diaphragm to be in a first position.

27. The device of claim 26, further comprising a controller connected to the first and second electrodes.

28. The device of claim 26, wherein the first part, the second part and the diaphragm are fabricated from polymer technology.

29. The device of claim 28, wherein the first and second parts are plastic parts.

30. The device of claim 26, wherein at least one of the first and second electrodes is coated with a dielectric material.

31. An electrostatic actuated valve comprising:

a bottom part having a ridge at a perimeter;

a post situated on the bottom part;

a squeezable tube situated on the post having a first end at the ridge for external access and a second end at the ridge for external access;

a diaphragm over the bottom part having an edge at the ridge;

a top part having a ridge that clamps the edge of the diaphragm;

a first electrode attached to the diaphragm; and

a second electrode attached to a bottom side of the top part.

32. The valve of claim 31, wherein:

the post is beyond the edge of the diaphragm; and

the diaphragm normally pushes on the tube thereby closing the way between the first end and the second end.

33. The valve of claim 32, wherein an application of a voltage across the first electrode and the second electrode lifts the diaphragm off the tube thereby at least partially opening the way between the first end and the second end.

34. The valve of claim 33, wherein a deposition of dielectric material is on at least one of the first and second electrodes.

35. The valve of claim 34, wherein:

the top part and the bottom part are plastic molded parts; and

the tube comprises a plastic.