Method of forming nanofluidic channels

• US 7,169,251 B2
• Filed: 05/13/2003
• Issued: 01/30/2007
• Est. Priority Date: 05/13/2002
• Status: Expired due to Fees

• Current Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Original Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Inventors: Cheng, Xing, Guo, Lingjie J
• Primary Examiner(s): Purvis; Sue A.
• Application Number:
  US10/436,657
• Publication Number:
  US 20030209314A1
• Time in Patent Office: 1,358 Days
• Field of Search: 156/230, 156/285, 156/286, 156/309.3, 156/308.2, 156/233, 156/237, 156/247, 156/290, 156/292, 156/297, 438/700, 438/706, 438/707, 438/710, 438/717, 438/757, 438/778, 436/180, 422/68.1, 422/100, 356/246, 356/344, 204450-454, 977/712, 977/773, 977/774, 977/780, 977/782, 977/840, 977/880, 977/882, 977/887, 977/888, 430/314
• US Class Current: 156/292
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/0681 Filter
• CPC Class Codes: B01L 2300/0896 Nanoscaled
• CPC Class Codes: B01L 2400/0418 electro-osmotic flow [EOF]
• CPC Class Codes: B01L 2400/0421 electrophoretic flow
• CPC Class Codes: B01L 2400/086 using baffles or other fixed flow obstructions
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B81B 2201/058 Microfluidics not provided for in B81B2201/051 - B81B2201/054
• CPC Class Codes: B81B 2203/0338 Channels
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2201/0153 Imprinting techniques not provided for in B81C2201/0152
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G01N 2021/058 Flat flow cell
• CPC Class Codes: Y10S 977/78 Possessing fully enclosed nanosized voids or physical holes
• CPC Class Codes: Y10S 977/84 Manufacture, treatment, or detection of nanostructure
• CPC Class Codes: Y10S 977/882 Assembling of separate components, e.g. by attaching

Abstract

A method of forming nanofluidic enclosed channels includes providing a first substrate having a layer of a first material disposed thereon. A plurality of nanoscale slots is formed along a second substrate using nanolithography, etching, or other disclosed techniques. The first substrate is then bonded to the second substrate such that the layer of the first material on the first substrate is adjacent the plurality of slots on the second substrate to define a plurality of enclosed nanofluidic channels therethrough.

Claims

1. A method of forming enclosed nanofluidic channels, said method comprising:

providing a first substrate having a layer of a first material thereon;

providing a second substrate;

forming a slot of nanoscale depth along said second substrate, said slot being formed by nanolithography and etching; and

bonding said first substrate to said second substrate such that said layer of said first material on said first substrate is adjacent said slot on said second substrate to define an enclosed nanofluidic channel therethrough.

2. The method according to claim 1, further comprising:

removing said first substrate from said layer of said first material after said bonding.

3. The method according to claim 1, further comprising:

forming a plurality of posts within said slot prior to said bonding of said first substrate to said second substrate.

4. The method according to claim 1 wherein said step of forming said slot along said second substrate includes forming a slot having both nanoscale and microscale dimensions.

5. The method according to claim 1, further comprising:

applying a metallic coating to at least a portion of one of said first substrate and said second substrate prior to said bonding to define at least one optical slit.

6. The method according to claim 1 wherein at least one of said first substrate and said second substrate includes an aperture formed therethrough to permit fluid communication with said enclosed nanofluidic channel.

7. The method according to claim 1 wherein said step of forming said slot along said second substrate includes forming a slot having microscale width along at least a portion of said slot.