Microfabricated elastomeric valve and pump systems
First Claim
1. A method of microfabricating an elastomeric structure, comprising:
- forming a first elastomeric layer on a substrate;
curing the first elastomeric layer;
patterning a first sacrificial layer over the first elastomeric layer;
forming a second elastomeric layer over the first elastomeric layer, thereby encapsulating the first patterned sacrificial layer between the first and second elastomeric layers;
curing the second elastomeric layer; and
removing the first patterned sacrificial layer selective to the first elastomeric layer and the second elastomeric layer, thereby forming at least one first recess between the first and second layers of elastomer;
wherein at least one of the first or second elastomeric layers comprises a magnetic portion.
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Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
137 Citations
15 Claims
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1. A method of microfabricating an elastomeric structure, comprising:
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forming a first elastomeric layer on a substrate; curing the first elastomeric layer; patterning a first sacrificial layer over the first elastomeric layer; forming a second elastomeric layer over the first elastomeric layer, thereby encapsulating the first patterned sacrificial layer between the first and second elastomeric layers; curing the second elastomeric layer; and removing the first patterned sacrificial layer selective to the first elastomeric layer and the second elastomeric layer, thereby forming at least one first recess between the first and second layers of elastomer; wherein at least one of the first or second elastomeric layers comprises a magnetic portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification