Spatial light modulator array with heat minimization and image enhancement features
First Claim
1. An enhanced spatial light modulator (SLM) array of a multitude of selectable pixel elements, each having physically-definable selected and non-selected modes, each pixel element comprising:
- a) an active region having a characteristic physical condition, which, when the pixel is in selected mode, serves to redirect the radiation incident on it to a primary image position which is located to be effective in a primary use; and
b) a passive region having a different characteristic physical condition, which, when the pixel is in selected mode, serves as means to redirect the radiation incident on it to a location other than said primary image position.
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Abstract
An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.
24 Citations
21 Claims
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1. An enhanced spatial light modulator (SLM) array of a multitude of selectable pixel elements, each having physically-definable selected and non-selected modes, each pixel element comprising:
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a) an active region having a characteristic physical condition, which, when the pixel is in selected mode, serves to redirect the radiation incident on it to a primary image position which is located to be effective in a primary use; and b) a passive region having a different characteristic physical condition, which, when the pixel is in selected mode, serves as means to redirect the radiation incident on it to a location other than said primary image position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification