Compact optical devices and methods for making the same

• US 7,171,065 B2
• Filed: 03/17/2005
• Issued: 01/30/2007
• Est. Priority Date: 03/17/2005
• Status: Expired due to Fees

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Yokouchi, Kishio, Lee, Michael G.
• Primary Examiner(s): PAK, SUNG H
• Application Number:
  US11/084,462
• Publication Number:
  US 20060210216A1
• Time in Patent Office: 684 Days
• Field of Search: None
• US Class Current: 385/14
• CPC Class Codes: G02B 2006/12159 Interferometer
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/1221 made from organic materials
• CPC Class Codes: G02F 1/212 Mach-Zehnder type
• CPC Class Codes: G02F 1/2255 controlled by a high-frequency electromagnetic component in an electric waveguide structure
• CPC Class Codes: G02F 2201/066 channel; buried
• CPC Class Codes: G02F 2202/022 polymeric

Abstract

Compact optical devices and methods of constructing the same are disclosed. The optical devices are formed with perpendicular orientations to the surface of a supporting layer (e.g., substrate), and have three-dimensional structures rather than planar structures. The optical devices can be formed with high density on supporting layers without the need for several built-up layers. Maintaining the processing temperatures within the cure profiles of polymer optical layers is readily achieved.

Claims

1. An optical device comprising:

a support layer having a top surface and a bottom surface;

a first waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a first height;

a second waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a second height, the second height being less than the first height;

a third waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a third height, the third height being greater than the first height and the second height;

a fourth waveguide segment that couples the second end of the first waveguide segment to the first end of the second waveguide segment;

a fifth waveguide segment that couples the second end of the first waveguide segment to the first end of the third waveguide segment; and

a first electrode disposed adjacent to at least one of the second and third waveguide segments.

2. The optical device of claim 1 wherein the third waveguide segments is disposed directly over the second waveguide segment.

3. The optical device of claim 1 further comprising:

a sixth waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a fourth height, the fourth height being equal to or greater than the second height and less than or equal to the third height;

a seventh waveguide segment that couples the second end of the second waveguide segment to the first end of the sixth waveguide segment; and

an eighth waveguide segment that couples the second end of the third waveguide segment to the first end of the sixth waveguide segment.

4. The optical device of claim 1 wherein the first electrode is disposed between the support layer and the second waveguide segment, and wherein the optical device further comprises:

a first cladding layer disposed between the first electrode and the second waveguide segment;

a second electrode disposed above the second waveguide segment; and

a second cladding layer disposed between the second electrode and the second waveguide segment; and

wherein at least one of the second core segment and the first and second cladding layers comprises an electro-optic material.

5. The optical device of claim 4 wherein the second core segment comprises an electro-optic material.

6. The optical device of claim 5 wherein at least one of the first and second cladding layers comprises an electro-optic material.

7. The optical device of claim 4 further comprising:

a third electrode disposed below the third waveguide segment and above the second electrode;

a third cladding layer disposed between the third electrode and the third waveguide segment;

a fourth electrode disposed above the third waveguide segment; and

a fourth cladding layer disposed between the fourth electrode and the third waveguide segment.

8. The optical device of claim 7 wherein the third core segment comprises an electro-optic material.

9. The optical device of claim 8 wherein at least one of the third and fourth cladding layers comprises an electro-optic material.

10. The optical device of claim 1 wherein the first electrode is disposed above the third waveguide segment, and wherein the optical device further comprises:

a fourth cladding layer disposed between said first electrode and the third waveguide segment.

11. The optical device of claim 1 wherein the first electrode is disposed below the third waveguide segment and above the second waveguide, and wherein the optical device further comprises:

a first cladding layer disposed between the first electrode and the third waveguide segment;

a second electrode disposed above the third waveguide segment; and

a second cladding layer disposed between the second electrode and the third waveguide segment; and

wherein at least one of the third core segment and the first and second cladding layers comprises an electro-optic material.

12. The optical device of claim 11 wherein the third core segment comprises an electro-optic material.

13. The optical device of claim 12 wherein at least one of the first and second cladding layers comprises an electro-optic material.

20. The optical device of claim 1 wherein the third waveguide segment has at least two lateral sides, and wherein the optical device further comprises:

a first electrode disposed to one lateral side of the third waveguide segment;

a first body of cladding material disposed between the first electrode and the third waveguide segment;

a second electrode disposed to another lateral side of the third waveguide segment; and

a second body of cladding material disposed between the second electrode and the third waveguide segment; and

wherein at least one of the third core segment and the first and second bodies of cladding material comprises an electro-optic material.

14. An optical device comprising:

a support layer having a top surface and a bottom surface;

a first waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a first height;

a second waveguide segment disposed above the top surface, and having a first end, a second end, at least two lateral sides, and an axis of light propagation spaced above the top surface by a second height, the second height being less than the first height;

a third waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a third height, the third height being greater than the first height and the second height;

a fourth waveguide segment that couples the second end of the first waveguide segment to the first end of the second waveguide segment;

a fifth waveguide segment that couples the second end of the first waveguide segment to the first end of the third waveguide segment;

a first electrode disposed to one lateral side of the second waveguide segment;

a first body of cladding material disposed between the first electrode and the second waveguide segment;

a second electrode disposed to another lateral side of the second waveguide segment; and

a second body of cladding material disposed between the second electrode and the second waveguide segment; and

wherein at least one of the second core segment and the first and second bodies cladding material comprises an electro-optic material.

15. The optical device of claim 14 wherein the second core segment comprises an electro-optic material.

16. The optical device of claim 15 wherein at least one of the first and second bodies of cladding material comprises an electro-optic material.

17. The optical device of claim 14 wherein the third waveguide segment has at least two lateral sides, and wherein the optical device further comprises:

a third electrode disposed to one lateral side of the third waveguide segment;

a third body of cladding material disposed between the third electrode and the third waveguide segment;

a fourth electrode disposed to another lateral side of the third waveguide segment; and

a fourth body of cladding material disposed between the fourth electrode and the third waveguide segment.

18. The optical device of claim 17 wherein the third core segment comprises an electro-optic material.

19. The optical device of claim 18 wherein at least one of the third and fourth bodies of cladding material comprises an electro-optic material.

21. An optical device comprising:

a support layer having a top surface and a bottom surface;

a first waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a first height;

a second waveguide segment disposed above the top surface, and having a first end, a second end, and an axis of light propagation spaced above the top surface by a second height, the second height being less than the first height;

a third waveguide segment disposed above the top surface, and having a first end, a second ends and an axis of light propagation spaced above the top surface by a third height, the third height being greater than the first height and the second height;

a fourth waveguide segment that couples the second end of the first waveguide segment to the first end of the second waveguide segment;

a fifth waveguide segment that couples the second end of the first waveguide segment to the first end of the third waveguide segment;

a first intermediate cladding layer disposed above the second waveguide segment;

a second intermediate cladding layer disposed between the third waveguide segment and the first intermediate cladding layer; and

a visually-detectable adhesion surface disposed between at least the first and second intermediate cladding layers; and

wherein the first intermediate cladding layer and the second waveguide and fourth waveguide segments are formed in a first support layer, wherein the second intermediate cladding layer and the third and fifth waveguide segments are formed in a second support layer, wherein the first waveguide segment is formed in at least one of the first and second support layers, and wherein the first and second support layers are joined together at said interfacial adhesion surface.

22. A method of forming an optical device comprising the steps of:

(a) forming a recess in a support layer, the recess having a first tapered end and a second tapered end;

(b) forming a first strip of core material such that at least a portion of the first strip is disposed along the recess, the first tapered end, and the second tapered end;

(c) forming a first cladding layer over a portion of the first strip of core material that lies within the recess;

(d) forming a second strip of core material over the first cladding layer such that the second strip contacts a first portion of the first strip that is disposed over the first tapered end, and contacts a second portion of the first strip that is disposed over the second tapered end.

23. The method of claim 22 further comprising the steps of:

prior to step (b), forming a first electrode within the recess, located under a portion of the first strip of core material; and

prior to step (b) forming a second cladding layer over the first electrode.

24. The method of claim of claim 23 further comprising the steps of:

prior to step (c), forming a third cladding layer over a portion of the first strip of core material that lies within the recess;

prior to step (c), forming a second electrode over the third cladding layer.

25. The method of claim 24 further comprising the steps of:

prior to step (d), forming a third electrode on the first cladding layer, the third electrode being located under a portion of the second strip of core material;

prior to step (d) forming a fourth cladding layer over the third electrode.

26. The method of claim 25 further comprising the steps of:

after step (d), forming a fifth cladding layer over the second strip of core material;

after step (d), forming a fourth electrode over the fifth cladding layer.

27. A method of forming an optical device comprising the steps of:

(a) forming a first support layer having a top surface, a bottom surface, a first core body disposed between the top and bottom surfaces, a second core body disposed between the top and bottom surfaces, and cladding material disposed around at least a portion of the first and second core bodies, the first core body have a first end, a second end, and an axis of light propagation substantially parallel to the top surface of the first support layer, the second core body having a first end disposed at the second end of the first core body, a second end disposed closer to the top surface than the bottom surface the first support substrate, and an axis of light propagation that is at an angle to the top surface of the first support substrate;

(b) forming a second support layer having a top surface, a bottom surface, a third core body disposed between the top and bottom surfaces, a fourth core body disposed between the top and bottom surfaces, and cladding material disposed around at least a portion of the third and fourth core bodies, the third core body have a first end, a second end, and an axis of light propagation substantially parallel to the top surface of the second support layer, the fourth core body having a first end disposed at the second end of the third core body, a second end disposed closer to the top surface than the bottom surface the second support substrate, and an axis of light propagation that is at an angle to the top surface of the second support substrate;

(c) forming a fifth core body at the top surface of one of the first and second support layers, the fifth core body having a first end disposed at the second end of one the second or fourth core body; and

(d) joining the first and second support layers together at their top surfaces.

28. The method of claim 27 wherein the fifth core body is formed at the top surface of the first support layer, wherein the first end of the fifth core body is disposed at the second end of the second core body, and wherein step (c) further comprises forming a sixth core body at the top surface of the second support layer, the sixth core body having a first end disposed at the second end of the fourth core body.