System and method for the analysis of semiconductor test data

• US 7,171,335 B2
• Filed: 12/21/2004
• Issued: 01/30/2007
• Est. Priority Date: 12/21/2004
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Liu, Jin, Wang, Jianglin, Jones-Williams, Pamula Jean, Donnelly, Emily A.
• Primary Examiner(s): Bui; Bryan
• Assistant Examiner(s): LE, JOHN H
• Application Number:
  US11/019,065
• Publication Number:
  US 20060136174A1
• Time in Patent Office: 770 Days
• Field of Search: 702 81- 84, 702/108, 702/181, 702182-183, 700/96, 707/102, 324/754, 324/765, 324/73.1, 714/738, 714/718, 438/14
• US Class Current: 702/182
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: Y10S 707/99943 Generating database or data structure, e.g. via user interface

Abstract

According to one embodiment, a method of analyzing semiconductor test data includes receiving a plurality of raw data entries from a testing system. Each raw data entry is associated with a test structure of a semiconductor device, and each raw data entry is uniquely identified by a name including a plurality of parseable fields. The plurality of data entries is parsed using a selected one of the plurality of parseable fields to identify a grouping of raw data entries. At least one reportable parameter indicative of the functionality of the test structures associated with the grouping of raw data entries is calculated, and the at least one reportable parameter is provided to a user.

Claims

1. A method of analyzing semiconductor test data, comprising:

receiving a plurality of raw data entries from a testing system, each raw data entry associated with a test structure of a semiconductor device, each raw data entry uniquely identified by a name including a plurality of parseable fields;

parsing the plurality of data entries using a selected one of the plurality of parseable fields to identify a grouping of raw data entries;

calculating at least one reportable parameter indicative of the functionality of the test structures associated with the grouping of raw data entries;

providing the at least one reportable parameter to user; and

comparing the at least one reportable parameter to a set of limits to determine whether the at least one reportable parameter is within the set of limits; and

disregarding the raw data entries if the at least one reportable parameter is not within the set of limits.

2. The method of claim 1, wherein the at least one reportable parameter comprises a yield calculated as a percentage of the grouping of raw data entries that is within the set of limits.

3. The method of claim 2, wherein the set of limits comprises a self consistent set of limits, the self consistent set of limits calculated as a function of the actual distribution of the plurality of raw data entries.

4. The method of claim 1, wherein the at least one reportable parameter is selected from a group consisting of:

yield loss percentage, system yield loss percentage, defect density, and pareto.

5. The method of claim 1, wherein the at least one parseable field in the name comprises a module category identifying the type of test structure.

6. The method of claim 1, wherein the at least one parseable field in the name comprises a descriptive name for the test structure, the descriptive name distinguishing the test structure from other similar test structures.

7. The method of claim 1, wherein the at least one parseable field in the name identifies a test performed to generate the raw data entry.

8. The method of claim 1, wherein the at least one parseable field in the name identifies a number associated with the test structure.

9. The method of claim 1, wherein providing the at least one reportable parameter to a user comprises presenting the at least one reportable parameter to the user on a graphical user interface screen.

10. The method of claim 1, wherein providing the at least one reportable parameter to a user comprises generating a printed report that includes at least one selected from a group consisting of a table, chart, graph, or figure.

11. A system for analyzing semiconductor test data, comprising:

a database storing a plurality of raw data entries from a testing system, each raw data entry associated with a test structure of a semiconductor device, each raw data entry uniquely identified by a name including a plurality of parseable fields;

a parser operable to;

parse the plurality of data entries using a selected one of the plurality of parseable fields to identify a grouping of raw data entries;

calculate at least one reportable parameter indicative of the functionality of the test structures associated with the grouping of raw data entries;

a manager operable to provide the at least one reportable parameter to a user; and

wherein the parser is further operable to;

compare the at least one reportable parameter to a set of limits to determine whether the at least one reportable parameter is within the set of limits; and

disregard the raw data entries if the at least one reportable parameter is not within the set of limits.

12. The system of claim 11, wherein the at least one reportable parameter comprises a yield calculated as a percentage of the grouping of raw data entries that is within the set of limits.

13. The system of claim 11, wherein the at least one reportable parameter is selected from a group consisting of:

yield loss percentage, system yield loss percentage, defect density, and pareto.

14. The system of claim 11, wherein the at least one parseable field in the name comprises a module category identifying the type of test structure.

15. The system of claim 11, wherein the at least one parseable field in the name comprises a descriptive name for the test structure, the descriptive name distinguishing the test structure from other similar test structures.

16. The system of claim 11, wherein providing the at least one reportable parameter to a user comprises presenting the at least one reportable parameter to the user on a graphical user interface screen.

17. The system of claim 11, wherein providing the at least one reportable parameter to a user comprises generating a printed report that includes at least one selected from a group consisting of a table, chart, graph, or figure.