Sensor for sensing temperature adjusted fluid pressure
First Claim
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1. A pressure sensor comprising:
- a first chamber having a first flexible membrane exposed to fluid pressure, the first membrane being configured to deflect in response to changes in the fluid pressure and changes in temperature within the first chamber;
a second chamber having a second flexible membrane sealed from the fluid pressure, the second membrane being configured to deflect in response to changes in temperature within the second chamber; and
associated circuitry for comparing the deflection of the first and second membranes to sense the fluid pressure.
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Abstract
A pressure sensor is provided incorporating a first chamber having a first flexible membrane exposed to fluid pressure and configured to deflect in response to changes in the fluid pressure and temperature within the first chamber, a second chamber having a second flexible membrane sealed from the fluid pressure and configured to deflect in response to changes in temperature within the second chamber, and associated circuitry for comparing the deflection of the first and second membranes to sense the fluid pressure.
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Citations
20 Claims
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1. A pressure sensor comprising:
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a first chamber having a first flexible membrane exposed to fluid pressure, the first membrane being configured to deflect in response to changes in the fluid pressure and changes in temperature within the first chamber; a second chamber having a second flexible membrane sealed from the fluid pressure, the second membrane being configured to deflect in response to changes in temperature within the second chamber; and associated circuitry for comparing the deflection of the first and second membranes to sense the fluid pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification