Moisture sensor device and self-diagnosing method therefor
First Claim
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1. A moisture sensor device comprising:
- a sensor portion having a capacitance that is varied in accordance with surrounding humidity;
a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity;
a heating portion for heating the sensor portion; and
a controller for controlling beating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period;
wherein the sensor portion comprises a substrate, a pair of detection electrodes disposed on the surface of the substrate so as to be spaced from each other and face each other, a detector that is provided on the substrate so as to cover the gap between the detection electrodes and whose relative permittivity is varied in accordance with moisture, and a reference capacitance portion that is provided on the same plane as the detection electrodes and has a pair of reference electrodes having substantially the same construction as the detection electrodes;
wherein the signal processor is equipped with a switched capacitor type C-V converter for converting the capacitance difference between the capacitance value of the detector and the capacitance value of the reference capacitance portion to the corresponding voltage;
wherein the heating portion comprises a heating element provided on the substrate;
wherein the heating element comprises a resistor as a heater electrode that is supplied with current to generate heat;
wherein the resistor is provided below the detection electrodes and the reference electrodes through an insulating layer;
wherein the resistor has substantially the same width as facing portions of the detection electrodes and the reference electrodes, and are provided in connection with the facing portions.
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Abstract
A moisture sensor device includes a sensor portion having a capacitance that is varied in accordance with surrounding humidity, a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity, a heating portion for heating the sensor portion, and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period.
38 Citations
21 Claims
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1. A moisture sensor device comprising:
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a sensor portion having a capacitance that is varied in accordance with surrounding humidity; a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity; a heating portion for heating the sensor portion; and a controller for controlling beating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period; wherein the sensor portion comprises a substrate, a pair of detection electrodes disposed on the surface of the substrate so as to be spaced from each other and face each other, a detector that is provided on the substrate so as to cover the gap between the detection electrodes and whose relative permittivity is varied in accordance with moisture, and a reference capacitance portion that is provided on the same plane as the detection electrodes and has a pair of reference electrodes having substantially the same construction as the detection electrodes; wherein the signal processor is equipped with a switched capacitor type C-V converter for converting the capacitance difference between the capacitance value of the detector and the capacitance value of the reference capacitance portion to the corresponding voltage; wherein the heating portion comprises a heating element provided on the substrate; wherein the heating element comprises a resistor as a heater electrode that is supplied with current to generate heat; wherein the resistor is provided below the detection electrodes and the reference electrodes through an insulating layer; wherein the resistor has substantially the same width as facing portions of the detection electrodes and the reference electrodes, and are provided in connection with the facing portions. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A moisture sensor device comprising:
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a sensor portion having a capacitance that is varied in accordance with surrounding humidity; a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity; a heating portion for heating the sensor portion; and a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period, wherein the sensor portion comprises a substrate, a pair of detection electrodes disposed on the surface of the substrate so as to be spaced from each other and face each other, a detector that is provided on the substrate so as to cover the gap between the detection electrodes and whose relative permittivity is varied in accordance with moisture, and a reference capacitance portion that is provided on the same plane as the detection electrodes and has a pair of reference electrodes having substantially the same construction as the detection electrodes; wherein the signal processor is equipped with a switched capacitor type C-V converter for converting the capacitance difference between the capacitance value of the detector and the capacitance value of the reference capacitance portion to the corresponding voltage; wherein the heating portion comprises a heating element provided on the substrate; wherein the heating element comprises a resistor as a heater electrode that is supplied with current to generate heat; wherein the resistor is provided on the same plane as the detection electrodes and the reference electrodes; wherein the resistor is provided between the pair of detection electrodes and between the pair of reference electrodes. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A moisture sensor device comprising:
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a sensor portion having a capacitance that is varied in accordance with surrounding humidity; a signal processor for processing a detection signal of the sensor portion and outputting the signal corresponding to the humidity; a heating portion for heating the sensor portion; a controller for controlling heating of the heating portion so that the capacitance of the sensor portion is substantially equal to a value under predetermined humidity at least during a self-diagnosis period; and wherein the sensor portion comprises a substrate, a pair of detection electrodes disposed on the surface of the substrate so as to be spaced from each other and face each other, a detector that is provided on the substrate so as to cover the gap between the detection electrodes and whose relative permittivity is varied in accordance with moisture, and a reference capacitance portion that is provided on the same plane as the detection electrodes and has a pair of reference electrodes having substantially the same construction as the detection electrodes; wherein the signal processor is equipped with a switched capacitor type C-V converter for converting the capacitance difference between the capacitance value of the detector and the capacitance value of the reference capacitance portion to the corresponding voltage; and wherein the heating portion comprises a heating element provided on the substrate; and
a protection film formed on the substrate so as to cover the detection electrodes and the reference electrodes, wherein the moisture sensitive film is provided on the protection film. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification