Capacitive vertical silicon bulk acoustic resonator
First Claim
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1. Acoustic resonator apparatus, comprising:
- a substrate comprising a resonator element having a length-to-frequency-determining-width ratio larger than one and that is coupled by way of one or more support structures to one or more bias pads; and
one or more electrodes disposed adjacent sides of the resonator element and separated therefrom by one or more capacitive gaps;
and wherein the resonant frequency of the resonator element is primarily determined by a single in-plane lateral dimension.
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Abstract
Disclosed are high frequency, vertical silicon bulk acoustic resonators. Resonator structures having a relatively large transduction areas fabricated using a HARPSS fabrication process provide for high frequency capacitive resonators with significantly low impedance values. Impedance values as low as a few kilo-Ohms to sub-kilo-Ohm and quality factors in the range of 20,000 to 90,000 in the VHF range have been achieved for a first thickness mode of fabricated vertical silicon bulk acoustic resonators. Resonant frequencies as high as 983 MHz have been demonstrated for higher third thickness modes of the vertical silicon bulk acoustic resonators.
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Citations
20 Claims
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1. Acoustic resonator apparatus, comprising:
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a substrate comprising a resonator element having a length-to-frequency-determining-width ratio larger than one and that is coupled by way of one or more support structures to one or more bias pads; and one or more electrodes disposed adjacent sides of the resonator element and separated therefrom by one or more capacitive gaps; and wherein the resonant frequency of the resonator element is primarily determined by a single in-plane lateral dimension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. Acoustic resonator apparatus, comprising:
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a substrate comprising a resonator element having a frequency-determining-width and that is coupled by way of one or more support structures to one or more bias pads; and one or more electrodes disposed adjacent sides of the resonator element and separated therefrom by one or more capacitive gaps; wherein the resonant frequency of the resonator element is primarily determined by a single in-plane lateral dimension; and wherein the resonator apparatus is frequency tunable. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification